Issued Patents All Time
Showing 25 most recent of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347639 | Method and systems useful for producing aluminum ions | Ying Tang, Joseph R. Despres, Oleg Byl, Barry Lewis Chambers | 2025-07-01 |
| 11881376 | Method and systems useful for producing aluminum ions | Ying Tang, Joe R. Despres, Oleg Byl, Barry Lewis Chambers | 2024-01-23 |
| 11827973 | Germanium tetraflouride and hydrogen mixtures for an ion implantation system | Oleg Byl, Ying Tang, Joseph R. Despres, Sharad N. Yedave | 2023-11-28 |
| 11682540 | Ion implantation system with mixture of arc chamber materials | Ying Tang, Sharad N. Yedave, Joseph R. Despres, Oleg Byl | 2023-06-20 |
| 11538687 | Fluorine ion implantation system with non-tungsten materials and methods of using | Ying Tang, Sharad N. Yedave, Joseph R. Despres | 2022-12-27 |
| 11333302 | Adsorbent-based, mechanically-regulated gas storage and delivery vessel | Joseph R. Despres, Edward A. Sturm | 2022-05-17 |
| 11299802 | Germanium tetraflouride and hydrogen mixtures for an ion implantation system | Oleg Byl, Ying Tang, Joseph R. Despres, Sharad N. Yedave | 2022-04-12 |
| 11139145 | Ion implantation system with mixture of arc chamber materials | Ying Tang, Sharad N. Yedave, Joseph R. Despres, Oleg Byl | 2021-10-05 |
| 11062906 | Silicon implantation in substrates and provision of silicon precursor compositions therefor | Ying Tang, Tianniu Chen, James J. Mayer, Richard S. Ray, Oleg Byl +2 more | 2021-07-13 |
| 10920087 | Hydrogenated isotopically enriched boront trifluoride dopant source gas composition | Steven E. Bishop, Sharad N. Yedave, Oleg Bly, Ying Tang | 2021-02-16 |
| 10892137 | Ion implantation processes and apparatus using gallium | Joseph R. Despres, Ying Tang, Sharad N. Yedave, Edward E. Jones, Oleg Byl | 2021-01-12 |
| 10845006 | Smart package | Edward E. Jones, Joseph R. Despres, Richard S. Ray, Peter C. Van Buskirk, Edward A. Sturm +1 more | 2020-11-24 |
| 10622192 | Methods and assemblies using fluorine containing and inert gases for plasma flood gun operation | Sharad N. Yedave, Ying Tang, Joseph R. Despres | 2020-04-14 |
| 10508773 | Smart package | Edward E. Jones, Joseph R. Despres, Richard S. Ray, Peter C. Van Buskirk, Edward A. Sturm +1 more | 2019-12-17 |
| 10497532 | Ion implantation processes and apparatus | Oleg Byl | 2019-12-03 |
| 10497569 | Carbon materials for carbon implantation | Oleg Byl, Robert Kaim | 2019-12-03 |
| 10354877 | Carbon dopant gas and co-flow for implant beam and source life performance improvement | Oleg Byl, Edward A. Sturm, Ying Tang, Sharad N. Yedave, Steven G. Sergi +1 more | 2019-07-16 |
| 10247363 | Smart package | Edward E. Jones, Joseph R. Despres, Richard S. Ray, Peter C. Van Buskirk, Edward A. Sturm +1 more | 2019-04-02 |
| 10109488 | Phosphorus or arsenic ion implantation utilizing enhanced source techniques | Oleg Byl, Sharad N. Yedave, Barry Lewis Chambers, Ying Tang | 2018-10-23 |
| 9996090 | Preparation of high pressure BF3/H2 mixtures | Oleg Byl | 2018-06-12 |
| 9991095 | Ion source cleaning in semiconductor processing systems | Sharad N. Yedave, Oleg Byl, Robert Kaim, David Eldridge, Lin Feng +3 more | 2018-06-05 |
| 9960042 | Carbon dopant gas and co-flow for implant beam and source life performance improvement | Oleg Byl, Edward A. Sturm, Ying Tang, Sharad N. Yedave, Steven G. Sergi +1 more | 2018-05-01 |
| 9938156 | B2F4 manufacturing process | Oleg Byl, Edward E. Jones, Chiranjeevi Pydi | 2018-04-10 |
| 9897257 | Anti-spike pressure management of pressure-regulated fluid storage and delivery vessels | Joseph R. Despres, Edward E. Jones, Matthew B. Donatucci, Chiranjeevi Pydi, Edward A. Sturm +2 more | 2018-02-20 |
| 9831063 | Ion implantation compositions, systems, and methods | Oleg Byl, Ying Tang, Richard S. Ray | 2017-11-28 |