Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9991095 | Ion source cleaning in semiconductor processing systems | Joseph D. Sweeney, Sharad N. Yedave, Oleg Byl, Robert Kaim, Lin Feng +3 more | 2018-06-05 |
| 8603252 | Cleaning of semiconductor processing systems | Frank Dimeo, Jr., James Dietz, W. Karl Olander, Robert Kaim, Steven E. Bishop +7 more | 2013-12-10 |
| 7626405 | Suspension system and adjustment mechanism for an integrated chip and method | — | 2009-12-01 |
| 7470140 | Integrated chip clamp adjustment assembly and method | — | 2008-12-30 |
| 4388682 | Microprogrammable instruction translator | — | 1983-06-14 |