Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11827973 | Germanium tetraflouride and hydrogen mixtures for an ion implantation system | Oleg Byl, Ying Tang, Joseph R. Despres, Joseph D. Sweeney | 2023-11-28 |
| 11682540 | Ion implantation system with mixture of arc chamber materials | Ying Tang, Joseph R. Despres, Joseph D. Sweeney, Oleg Byl | 2023-06-20 |
| 11621148 | Plasma immersion methods for ion implantation | Ying Tang, Bryan C. Hendrix, Oleg Byl | 2023-04-04 |
| 11538687 | Fluorine ion implantation system with non-tungsten materials and methods of using | Ying Tang, Joseph R. Despres, Joseph D. Sweeney | 2022-12-27 |
| 11315791 | Fluorine ion implantation method and system | Ying Tang | 2022-04-26 |
| 11299802 | Germanium tetraflouride and hydrogen mixtures for an ion implantation system | Oleg Byl, Ying Tang, Joseph R. Despres, Joseph D. Sweeney | 2022-04-12 |
| 11139145 | Ion implantation system with mixture of arc chamber materials | Ying Tang, Joseph R. Despres, Joseph D. Sweeney, Oleg Byl | 2021-10-05 |
| 11062906 | Silicon implantation in substrates and provision of silicon precursor compositions therefor | Ying Tang, Joseph D. Sweeney, Tianniu Chen, James J. Mayer, Richard S. Ray +2 more | 2021-07-13 |
| 10920087 | Hydrogenated isotopically enriched boront trifluoride dopant source gas composition | Steven E. Bishop, Oleg Bly, Joseph D. Sweeney, Ying Tang | 2021-02-16 |
| 10892137 | Ion implantation processes and apparatus using gallium | Joseph D. Sweeney, Joseph R. Despres, Ying Tang, Edward E. Jones, Oleg Byl | 2021-01-12 |
| 10622192 | Methods and assemblies using fluorine containing and inert gases for plasma flood gun operation | Ying Tang, Joseph R. Despres, Joseph D. Sweeney | 2020-04-14 |
| 10354877 | Carbon dopant gas and co-flow for implant beam and source life performance improvement | Oleg Byl, Edward A. Sturm, Ying Tang, Joseph D. Sweeney, Steven G. Sergi +1 more | 2019-07-16 |
| 10109488 | Phosphorus or arsenic ion implantation utilizing enhanced source techniques | Oleg Byl, Joseph D. Sweeney, Barry Lewis Chambers, Ying Tang | 2018-10-23 |
| 9991095 | Ion source cleaning in semiconductor processing systems | Joseph D. Sweeney, Oleg Byl, Robert Kaim, David Eldridge, Lin Feng +3 more | 2018-06-05 |
| 9960042 | Carbon dopant gas and co-flow for implant beam and source life performance improvement | Oleg Byl, Edward A. Sturm, Ying Tang, Joseph D. Sweeney, Steven G. Sergi +1 more | 2018-05-01 |
| 9685304 | Isotopically-enriched boron-containing compounds, and methods of making and using same | Robert Kaim, Joseph D. Sweeney, Oleg Byl, Edward E. Jones, Peng Zou +3 more | 2017-06-20 |
| 9142387 | Isotopically-enriched boron-containing compounds, and methods of making and using same | Robert Kaim, Joseph D. Sweeney, Oleg Byl, Edward E. Jones, Peng Zou +3 more | 2015-09-22 |
| 9111860 | Ion implantation system and method | Edward E. Jones, Ying Tang, Barry Lewis Chambers, Robert Kaim, Joseph D. Sweeney +2 more | 2015-08-18 |
| 8796131 | Ion implantation system and method | Edward E. Jones, Ying Tang, Barry Lewis Chambers, Robert Kaim, Joseph D. Sweeney +2 more | 2014-08-05 |
| 8603252 | Cleaning of semiconductor processing systems | Frank Dimeo, Jr., James Dietz, W. Karl Olander, Robert Kaim, Steven E. Bishop +7 more | 2013-12-10 |
| 8598022 | Isotopically-enriched boron-containing compounds, and methods of making and using same | Robert Kaim, Joseph D. Sweeney, Oleg Byl, Edward E. Jones, Peng Zou +3 more | 2013-12-03 |
| 8138071 | Isotopically-enriched boron-containing compounds, and methods of making and using same | Robert Kaim, Joseph D. Sweeney, Oleg Byl, Edward E. Jones, Peng Zou +3 more | 2012-03-20 |
| 8062965 | Isotopically-enriched boron-containing compounds, and methods of making and using same | Robert Kaim, Joseph D. Sweeney, Oleg Byl, Edward E. Jones, Peng Zou +3 more | 2011-11-22 |
| 6607782 | Methods of making and using cubic boron nitride composition, coating and articles made therefrom | Ajay P. Malshe, William D. Brown, William C. Russell, Deepak G. Bhat | 2003-08-19 |