Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10920087 | Hydrogenated isotopically enriched boront trifluoride dopant source gas composition | Sharad N. Yedave, Oleg Bly, Joseph D. Sweeney, Ying Tang | 2021-02-16 |
| 10229840 | Ion implanter comprising integrated ventilation system | W. Karl Olander, Ying Tang, Barry Lewis Chambers | 2019-03-12 |
| 9991095 | Ion source cleaning in semiconductor processing systems | Joseph D. Sweeney, Sharad N. Yedave, Oleg Byl, Robert Kaim, David Eldridge +3 more | 2018-06-05 |
| 9170246 | Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel | James Dietz, James V. McManus, Steven M. Lurcott, Michael J. Wodjenski, Robert Kaim +1 more | 2015-10-27 |
| 8603252 | Cleaning of semiconductor processing systems | Frank Dimeo, Jr., James Dietz, W. Karl Olander, Robert Kaim, Jeffrey W. Neuner +7 more | 2013-12-10 |
| 8555705 | Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel | James Dietz, James V. McManus, Steven M. Lurcott, Michael J. Wodjenski, Robert Kaim +1 more | 2013-10-15 |
| 7966879 | Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel | James Dietz, James V. McManus, Steven M. Lurcott, Michael J. Wodjenski, Robert Kaim +1 more | 2011-06-28 |
| 7819981 | Methods for cleaning ion implanter components | Frank Dimeo, Jr., James Dietz, W. Karl Olander, Robert Kaim, Jeffrey W. Neuner +1 more | 2010-10-26 |