Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8603252 | Cleaning of semiconductor processing systems | Frank Dimeo, Jr., James Dietz, W. Karl Olander, Robert Kaim, Steven E. Bishop +7 more | 2013-12-10 |
| 8109130 | Apparatus and process for sensing fluoro species in semiconductor processing systems | Frank Dimeo, Jr., Philip S. H. Chen, James Welch, Michele Stawasz, Thomas H. Baum +3 more | 2012-02-07 |
| 7819981 | Methods for cleaning ion implanter components | Frank Dimeo, Jr., James Dietz, W. Karl Olander, Robert Kaim, Steven E. Bishop +1 more | 2010-10-26 |
| 7655887 | Feedback control system and method for maintaining constant resistance operation of electrically heated elements | Ing-Shin Chen, Richard Kramer | 2010-02-02 |
| 7475588 | Apparatus and process for sensing fluoro species in semiconductor processing systems | Frank Dimeo, Jr., Philip S. H. Chen, James Welch, Michele Stawacz, Thomas H. Baum +3 more | 2009-01-13 |
| 7370511 | Gas sensor with attenuated drift characteristic | Ing-Shin Chen, Frank Dimeo, Jr., Philip S. H. Chen, James Welch, Bryan C. Hendrix | 2008-05-13 |
| 7296458 | Nickel-coated free-standing silicon carbide structure for sensing fluoro or halogen species in semiconductor processing systems, and processes of making and using same | Frank Dimeo, Jr., Philip S. H. Chen, Ing-Shin Chen, James Welch | 2007-11-20 |
| 7296460 | Apparatus and process for sensing fluoro species in semiconductor processing systems | Frank Dimeo, Jr., Philip S. H. Chen, James Welch, Michele Stawasz, Thomas H. Baum +3 more | 2007-11-20 |
| 7228724 | Apparatus and process for sensing target gas species in semiconductor processing systems | Philip S. H. Chen, Ing-Shin Chen, Frank Dimeo, Jr., James Welch, Jeffrey F. Roeder | 2007-06-12 |
| 7193187 | Feedback control system and method for maintaining constant resistance operation of electrically heated elements | Ing-Shin Chen | 2007-03-20 |
| 7080545 | Apparatus and process for sensing fluoro species in semiconductor processing systems | Frank Dimeo, Jr., Philip S. H. Chen, James Welch, Michele Stawasz, Thomas H. Baum +3 more | 2006-07-25 |