| 12480209 |
Vaporization vessel and method |
Scott L. Battle, David James Eldridge, John N. Gregg, Jacob Thomas, Manuel F. Gonzales +2 more |
2025-11-25 |
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| 12392040 |
Metal body having magnesium fluoride region formed therefrom |
Carlo Waldfried |
2025-08-19 |
|
| 12359309 |
Group VI metal deposition process |
Philip S. H. Chen, Shawn D. Nguyen, Thomas H. Baum |
2025-07-15 |
|
| 12347672 |
Silicon precursor compounds and method for forming silicon-containing films |
Sungsil Cho, Dahye Kim, HwanSoo Kim, Soojin Lee |
2025-07-01 |
|
| 12312678 |
Methods for depositing a tungsten or molybdenum layer in the presence of a reducing co-reactant |
Robert Wright, Jr., Thomas H. Baum, James WOECKENER |
2025-05-27 |
|
| 12264392 |
Silicon precursor compounds and method for forming silicon-containing films |
Sungsil Cho, Dahye Kim, Soojin Lee, Jae-eon Park, Philip S. H. Chen +1 more |
2025-04-01 |
|
| 12252787 |
Methods for depositing tungsten or molybdenum films |
Robert Wright, Jr., Thomas H. Baum, Shawn D. Nguyen, Han Wang, Philip S. H. Chen |
2025-03-18 |
|
| 12237170 |
Haloalkynyl dicobalt hexacarbonyl precursors for chemical vapor deposition of cobalt |
Sangbum Han, Seobong Chang, Jaeeon Park, Thomas H. Baum |
2025-02-25 |
|
| 12209105 |
Vapor deposition precursor compounds and process of use |
Philip S. H. Chen, Eric Condo, Thomas H. Baum, David Kuiper |
2025-01-28 |
|
| 12084778 |
Coatings for enhancement of properties and performance of substrate articles and apparatus |
David Walter Peters, Weimin Li, Carlo Waldfried, Richard A. Cooke, Nilesh Gunda +1 more |
2024-09-10 |
$62,147,000 |
| 12071688 |
Precursors and methods for preparing silicon-containing films |
Sangjin Lee, Dahye Kim, Sungsil Cho, Seobong Chang, Jae-eon Park +2 more |
2024-08-27 |
$43,379,000 |
| 12037681 |
Method for forming carbon rich silicon-containing films |
Sungsil Cho, Seobong Chang, Jae-eon Park, Thomas H. Baum |
2024-07-16 |
$31,851,000 |
| 12018382 |
Coatings for enhancement of properties and performance of substrate articles and apparatus |
David Walter Peters, Weimin Li, Carlo Waldfried, Richard A. Cooke, Nilesh Gunda +1 more |
2024-06-25 |
$70,474,000 |
| 11987878 |
Chemical vapor deposition processes using ruthenium precursor and reducing gas |
Philip S. H. Chen, Thomas H. Baum |
2024-05-21 |
$68,213,000 |
| 11965239 |
Method for nucleation of conductive nitride films |
Gavin Charles Richards, Thomas H. Baum, Han Wang |
2024-04-23 |
$165,090,000 |
| 11919780 |
Oxyhalide precursors |
David M. Ermert, Robert Wright, Jr., Thomas H. Baum |
2024-03-05 |
$64,727,000 |
| 11821087 |
Vaporization vessel and method |
Scott L. Battle, David James Eldridge, John N. Gregg, Jacob Thomas, Manuel F. Gonzales +2 more |
2023-11-21 |
$73,665,000 |
| 11804375 |
Haloalkynyl dicobalt hexacarbonyl precursors for chemical vapor deposition of cobalt |
Sangbum Han, Seobong Chang, Jaeeon Park, Thomas H. Baum |
2023-10-31 |
$133,513,000 |
| 11761081 |
Methods for depositing tungsten or molybdenum films |
Robert Wright, Jr., Thomas H. Baum, Shawn D. Nguyen, Han Wang, Philip S. H. Chen |
2023-09-19 |
$50,648,000 |
| 11746413 |
Chemical delivery system and method of operating the chemical delivery system |
David James Eldridge, David Walter Peters, Robert Wright, Jr., Scott L. Battle, John N. Gregg |
2023-09-05 |
$81,157,000 |
| 11621148 |
Plasma immersion methods for ion implantation |
Ying Tang, Oleg Byl, Sharad N. Yedave |
2023-04-04 |
$58,773,000 |
| 11560625 |
Vapor deposition of molybdenum using a bis(alkyl-arene) molybdenum precursor |
Robert Wright, Jr., Shuang Meng, Thomas H. Baum, Philip S. H. Chen |
2023-01-24 |
$42,416,000 |
| 11466038 |
Vapor deposition precursor compounds and process of use |
Philip S. H. Chen, Eric Condo, Thomas H. Baum, David Kuiper |
2022-10-11 |
$32,927,000 |
| 11421320 |
Chemical delivery system and method of operating the chemical delivery system |
David James Eldridge, David Walter Peters, Robert Wright, Jr., Scott L. Battle, John N. Gregg |
2022-08-23 |
$45,341,000 |
| 11414750 |
Method for forming carbon rich silicon-containing films |
Sungsil Cho, Seobong Chang, Jae-eon Park, Thomas H. Baum |
2022-08-16 |
$44,443,000 |
