Issued Patents All Time
Showing 25 most recent of 95 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12392040 | Metal body having magnesium fluoride region formed therefrom | Carlo Waldfried | 2025-08-19 |
| 12359309 | Group VI metal deposition process | Philip S. H. Chen, Shawn D. Nguyen, Thomas H. Baum | 2025-07-15 |
| 12347672 | Silicon precursor compounds and method for forming silicon-containing films | Sungsil Cho, Dahye Kim, HwanSoo Kim, Soojin Lee | 2025-07-01 |
| 12312678 | Methods for depositing a tungsten or molybdenum layer in the presence of a reducing co-reactant | Robert Wright, Jr., Thomas H. Baum, James WOECKENER | 2025-05-27 |
| 12264392 | Silicon precursor compounds and method for forming silicon-containing films | Sungsil Cho, Dahye Kim, Soojin Lee, Jae-eon Park, Philip S. H. Chen +1 more | 2025-04-01 |
| 12252787 | Methods for depositing tungsten or molybdenum films | Robert Wright, Jr., Thomas H. Baum, Shawn D. Nguyen, Han Wang, Philip S. H. Chen | 2025-03-18 |
| 12237170 | Haloalkynyl dicobalt hexacarbonyl precursors for chemical vapor deposition of cobalt | Sangbum Han, Seobong Chang, Jaeeon Park, Thomas H. Baum | 2025-02-25 |
| 12209105 | Vapor deposition precursor compounds and process of use | Philip S. H. Chen, Eric Condo, Thomas H. Baum, David Kuiper | 2025-01-28 |
| 12084778 | Coatings for enhancement of properties and performance of substrate articles and apparatus | David Walter Peters, Weimin Li, Carlo Waldfried, Richard A. Cooke, Nilesh Gunda +1 more | 2024-09-10 |
| 12071688 | Precursors and methods for preparing silicon-containing films | Sangjin Lee, Dahye Kim, Sungsil Cho, Seobong Chang, Jae-eon Park +2 more | 2024-08-27 |
| 12037681 | Method for forming carbon rich silicon-containing films | Sungsil Cho, Seobong Chang, Jae-eon Park, Thomas H. Baum | 2024-07-16 |
| 12018382 | Coatings for enhancement of properties and performance of substrate articles and apparatus | David Walter Peters, Weimin Li, Carlo Waldfried, Richard A. Cooke, Nilesh Gunda +1 more | 2024-06-25 |
| 11987878 | Chemical vapor deposition processes using ruthenium precursor and reducing gas | Philip S. H. Chen, Thomas H. Baum | 2024-05-21 |
| 11965239 | Method for nucleation of conductive nitride films | Gavin Charles Richards, Thomas H. Baum, Han Wang | 2024-04-23 |
| 11919780 | Oxyhalide precursors | David M. Ermert, Robert Wright, Jr., Thomas H. Baum | 2024-03-05 |
| 11821087 | Vaporization vessel and method | Scott L. Battle, David James Eldridge, John N. Gregg, Jacob Thomas, Manuel F. Gonzales +2 more | 2023-11-21 |
| 11804375 | Haloalkynyl dicobalt hexacarbonyl precursors for chemical vapor deposition of cobalt | Sangbum Han, Seobong Chang, Jaeeon Park, Thomas H. Baum | 2023-10-31 |
| 11761081 | Methods for depositing tungsten or molybdenum films | Robert Wright, Jr., Thomas H. Baum, Shawn D. Nguyen, Han Wang, Philip S. H. Chen | 2023-09-19 |
| 11746413 | Chemical delivery system and method of operating the chemical delivery system | David James Eldridge, David Walter Peters, Robert Wright, Jr., Scott L. Battle, John N. Gregg | 2023-09-05 |
| 11621148 | Plasma immersion methods for ion implantation | Ying Tang, Oleg Byl, Sharad N. Yedave | 2023-04-04 |
| 11560625 | Vapor deposition of molybdenum using a bis(alkyl-arene) molybdenum precursor | Robert Wright, Jr., Shuang Meng, Thomas H. Baum, Philip S. H. Chen | 2023-01-24 |
| 11466038 | Vapor deposition precursor compounds and process of use | Philip S. H. Chen, Eric Condo, Thomas H. Baum, David Kuiper | 2022-10-11 |
| 11421320 | Chemical delivery system and method of operating the chemical delivery system | David James Eldridge, David Walter Peters, Robert Wright, Jr., Scott L. Battle, John N. Gregg | 2022-08-23 |
| 11414750 | Method for forming carbon rich silicon-containing films | Sungsil Cho, Seobong Chang, Jae-eon Park, Thomas H. Baum | 2022-08-16 |
| 11380539 | Selective deposition of silicon nitride | Han Wang, Eric Condo, Thomas H. Baum | 2022-07-05 |