Issued Patents All Time
Showing 25 most recent of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11935756 | Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same | Baosuo Zhou, Mirzafer Abatchev, Ardavan Niroomand, Paul A. Morgan, Joseph Neil Greeley +1 more | 2024-03-19 |
| 11560625 | Vapor deposition of molybdenum using a bis(alkyl-arene) molybdenum precursor | Robert Wright, Jr., Bryan C. Hendrix, Thomas H. Baum, Philip S. H. Chen | 2023-01-24 |
| 11335563 | Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same | Baosuo Zhou, Mirzafer Abatchev, Ardavan Niroomand, Paul A. Morgan, Joseph Neil Greeley +1 more | 2022-05-17 |
| 11289323 | Processing of semiconductors using vaporized solvents | Shawming Ma, Michael X. Yang | 2022-03-29 |
| 11107675 | CVD Mo deposition by using MoOCl4 | Thomas H. Baum, Philip S. H. Chen, Robert Wright, Jr., Bryan C. Hendrix, Richard Assion | 2021-08-31 |
| 11039527 | Air leak detection in plasma processing apparatus with separation grid | Xinliang Lu, Shawming Ma, Hua Chung | 2021-06-15 |
| 10607844 | Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same | Baosuo Zhou, Mirzafer Abatchev, Ardavan Niroomand, Paul A. Morgan, Joseph Neil Greeley +1 more | 2020-03-31 |
| 10453744 | Low temperature molybdenum film deposition utilizing boron nucleation layers | Richard Assion, Thomas H. Baum, Bryan C. Hendrix | 2019-10-22 |
| 10096483 | Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same | Baosuo Zhou, Mirzafer Abatchev, Ardavan Niroomand, Paul A. Morgan, Joseph Neil Greeley +1 more | 2018-10-09 |
| 9761457 | Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same | Baosuo Zhou, Mirzafer Abatchev, Ardavan Niroomand, Paul A. Morgan, Joseph Neil Greeley +1 more | 2017-09-12 |
| 9305782 | Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same | Baosuo Zhou, Mirzafer Abatchev, Ardavan Niroomand, Paul A. Morgan, Joseph Neil Greely +1 more | 2016-04-05 |
| 8852851 | Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same | Baosuo Zhou, Mirzafer Abatchev, Ardavan Niroomand, Paul A. Morgan, Joseph Neil Greeley +1 more | 2014-10-07 |
| 8816447 | Transistor with reduced depletion field width | Garo Derderian, Gurtej S. Sandhu | 2014-08-26 |
| 8791519 | High dielectric constant transition metal oxide materials | Jiutao Li | 2014-07-29 |
| 8598632 | Integrated circuit having pitch reduced patterns relative to photoithography features | Luan C. Tran, William T. Rericha, John Lee, Ramakanth Alapati, Sheron Honarkhah +7 more | 2013-12-03 |
| 8362576 | Transistor with reduced depletion field width | Garo Derderian, Gurtej S. Sandhu | 2013-01-29 |
| 8257497 | Insitu post atomic layer deposition destruction of active species | Demetrius Sarigiannis, Garo Derderian | 2012-09-04 |
| 8207576 | Pitch reduced patterns relative to photolithography features | Luan C. Tran, William T. Rericha, John Lee, Ramakanth Alapati, Sheron Honarkhah +7 more | 2012-06-26 |
| 8129289 | Method to deposit conformal low temperature SiO2 | John Smythe, Gurtej S. Sandhu, Brian J. Coppa, Shyam Surthi | 2012-03-06 |
| 8123968 | Multiple deposition for integration of spacers in pitch multiplication process | Jingyi Bai, Gurtej S. Sandhu | 2012-02-28 |
| 8119535 | Pitch reduced patterns relative to photolithography features | Luan C. Tran, William T. Rericha, John Lee, Ramakanth Alapati, Sheron Honarkhah +7 more | 2012-02-21 |
| 8048812 | Pitch reduced patterns relative to photolithography features | Luan C. Tran, William T. Rericha, John Lee, Ramakanth Alapati, Sheron Honarkhah +7 more | 2011-11-01 |
| 7884022 | Multiple deposition for integration of spacers in pitch multiplication process | Jingyi Bai, Gurtej S. Sandhu | 2011-02-08 |
| 7872291 | Enhanced atomic layer deposition | Garo Derderian, Gurtej S. Sandhu | 2011-01-18 |
| 7838084 | Atomic layer deposition method of depositing an oxide on a substrate | Garo Derderian, Danny Dynka | 2010-11-23 |