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Method to align mask patterns |
Gurtej S. Sandhu, Randal W. Chance |
2014-03-18 |
| 8657597 |
Templates for use in imprint lithography and related intermediate template structures |
Gurtej S. Sandhu |
2014-02-25 |
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Integrated circuit having pitch reduced patterns relative to photoithography features |
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Method to align mask patterns |
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2012-12-25 |
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Method for integrated circuit fabrication using pitch multiplication |
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2012-07-10 |
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Pitch reduced patterns relative to photolithography features |
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2012-06-26 |
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Pitch reduced patterns relative to photolithography features |
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2012-02-21 |
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Pitch reduced patterns relative to photolithography features |
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2011-11-01 |
| 7771917 |
Methods of making templates for use in imprint lithography |
Gurtej S. Sandhu |
2010-08-10 |
| 7718540 |
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2010-05-18 |
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Method for integrated circuit fabrication using pitch multiplication |
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2010-03-30 |
| 7655387 |
Method to align mask patterns |
Gurtej S. Sandhu, Randal W. Chance |
2010-02-02 |
| 7651951 |
Pitch reduced patterns relative to photolithography features |
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2010-01-26 |
| 7629693 |
Method for integrated circuit fabrication using pitch multiplication |
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2009-12-08 |
| 7547640 |
Method for integrated circuit fabrication using pitch multiplication |
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2009-06-16 |
| 7455956 |
Method to align mask patterns |
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2008-11-25 |
| 7435536 |
Method to align mask patterns |
Gurtej S. Sandhu, Randal W. Chance |
2008-10-14 |
| 7298453 |
Method and apparatus for irradiating a microlithographic substrate |
Ulrich Boettiger, Scott L. Light, Craig Hickman |
2007-11-20 |
| 7253118 |
Pitch reduced patterns relative to photolithography features |
Luan C. Tran, John Lee, Raman Alapati, Sheron Honarkhah, Shuang Meng +7 more |
2007-08-07 |
| 7115525 |
Method for integrated circuit fabrication using pitch multiplication |
Mirzafer Abatchev, Gurtej S. Sandhu, Luan C. Tran, D. Mark Durcan |
2006-10-03 |
| 7038762 |
Method and apparatus for irradiating a microlithographic substrate |
Ulrich Boettiger, Scott L. Light, Craig Hickman |
2006-05-02 |
| 6784975 |
Method and apparatus for irradiating a microlithographic substrate |
Ulrich Boettiger, Scott L. Light, Craig Hickman |
2004-08-31 |
| 5925410 |
Vibration-enhanced spin-on film techniques for semiconductor device processing |
Salman Akram, Paul D. Shirley |
1999-07-20 |
| 5849435 |
Method for forming a thin uniform layer of resist for lithography |
Salman Akram, Paul D. Shirley |
1998-12-15 |
| 5609995 |
Method for forming a thin uniform layer of resist for lithography |
Salman Akram, Paul D. Shirley |
1997-03-11 |
