Issued Patents All Time
Showing 25 most recent of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183621 | Methods for adjusting surface topography of a substrate support apparatus | — | 2024-12-31 |
| 11450552 | Methods and apparatus for adjusting surface topography of a substrate support apparatus | — | 2022-09-20 |
| 8859195 | Methods of lithographically patterning a substrate | Yoshiki Hishiro, Scott E. Sills, Hiroyuki Mori, Troy Gugel, Lijing Gou +1 more | 2014-10-14 |
| 8309297 | Methods of lithographically patterning a substrate | Yoshiki Hishiro, Scott E. Sills, Hiroyuki Mori, Troy Gugel, Lijing Gou +1 more | 2012-11-13 |
| 8163468 | Method of reducing photoresist defects during fabrication of a semiconductor device | Yoshiki Hishiro, Lijing Gou, Scott E. Sills, Hiroyuki Mori, Troy Gugel +1 more | 2012-04-24 |
| 8124326 | Methods of patterning positive photoresist | Hiroyuki Mori | 2012-02-28 |
| 7846851 | Method and apparatus for a two-step resist soft bake to prevent ILD outgassing during semiconductor processing | Gordon A. Haller | 2010-12-07 |
| 7737055 | Systems and methods for manipulating liquid films on semiconductor substrates | Hiroyuki Mori | 2010-06-15 |
| 7605350 | System for two-step resist soft bake to prevent ILD outgassing during semiconductor processing | Gordon A. Haller | 2009-10-20 |
| 7470638 | Systems and methods for manipulating liquid films on semiconductor substrates | Hiroyuki Mori | 2008-12-30 |
| 7370659 | Photolithographic stepper and/or scanner machines including cleaning devices and methods of cleaning photolithographic stepper and/or scanner machines | Craig Hickman | 2008-05-13 |
| 7361234 | Photolithographic stepper and/or scanner machines including cleaning devices and methods of cleaning photolithographic stepper and/or scanner machines | Craig Hickman | 2008-04-22 |
| 6872254 | Method and apparatus for controlling air over a spinning microelectronic substrate | — | 2005-03-29 |
| 6830619 | Method and apparatus for controlling a temperature of a microelectronic substrate | — | 2004-12-14 |
| 6817057 | Spindle chuck cleaner | Craig Hickman | 2004-11-16 |
| 6645703 | Methods of photo-processing photoresist | Ziad R. Hatab, Tony C. Krauth | 2003-11-11 |
| 6576055 | Method and apparatus for controlling air over a spinning microelectronic substrate | — | 2003-06-10 |
| 6569241 | Substrate spinning apparatus | Brian F. Gordon | 2003-05-27 |
| 6555276 | Substrate coating and semiconductor processing method of improving uniformity of liquid deposition | Brian F. Gordon | 2003-04-29 |
| 6548111 | Method for controlling a temperature of a microelectronic substrate | — | 2003-04-15 |
| 6548110 | Process liquid dispense method and apparatus | — | 2003-04-15 |
| 6482552 | Reticle forming methods | Ziad R. Hatab, Tony C. Krauth | 2002-11-19 |
| 6402845 | Process liquid dispense method and apparatus | — | 2002-06-11 |
| 6398868 | Substrate coating apparatus | Brian F. Gordon | 2002-06-04 |
| 6322626 | Apparatus for controlling a temperature of a microelectronics substrate | — | 2001-11-27 |