Issued Patents All Time
Showing 25 most recent of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11935756 | Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same | Baosuo Zhou, Ardavan Niroomand, Paul A. Morgan, Shuang Meng, Joseph Neil Greeley +1 more | 2024-03-19 |
| 11335563 | Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same | Baosuo Zhou, Ardavan Niroomand, Paul A. Morgan, Shuang Meng, Joseph Neil Greeley +1 more | 2022-05-17 |
| 10607844 | Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same | Baosuo Zhou, Ardavan Niroomand, Paul A. Morgan, Shuang Meng, Joseph Neil Greeley +1 more | 2020-03-31 |
| 10600648 | Silicon-based deposition for semiconductor processing | Tom A. Kamp | 2020-03-24 |
| 10446394 | Spacer profile control using atomic layer deposition in a multiple patterning process | Qian Fu, Yoko Yamaguchi, Aaron Eppler | 2019-10-15 |
| 10181412 | Negative ion control for dielectric etch | Alexei Marakhtanov, Rajinder Dhindsa, Eric A. Hudson, Andrew D. Bailey, III | 2019-01-15 |
| 10096483 | Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same | Baosuo Zhou, Ardavan Niroomand, Paul A. Morgan, Shuang Meng, Joseph Neil Greeley +1 more | 2018-10-09 |
| 9941123 | Post etch treatment to prevent pattern collapse | Qian Fu, Yasushi Ishikawa | 2018-04-10 |
| 9761457 | Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same | Baosuo Zhou, Ardavan Niroomand, Paul A. Morgan, Shuang Meng, Joseph Neil Greeley +1 more | 2017-09-12 |
| 9679781 | Methods for integrated circuit fabrication with protective coating for planarization | David H. Wells, Baosuo Zhou, Krupakar M. Subramanian | 2017-06-13 |
| 9478497 | Single spacer process for multiplying pitch by a factor greater than two and related intermediate IC structures | David H. Wells | 2016-10-25 |
| 9305782 | Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same | Baosuo Zhou, Ardavan Niroomand, Paul A. Morgan, Shuang Meng, Joseph Neil Greely +1 more | 2016-04-05 |
| 9267605 | Pressure control valve assembly of plasma processing chamber and rapid alternating process | Camelia Rusu, Brian McMillin | 2016-02-23 |
| 9117767 | Negative ion control for dielectric etch | Alexei Marakhatanov, Rajinder Dhindsa, Eric A. Hudson, Andrew D. Bailey, III | 2015-08-25 |
| 9099402 | Integrated circuit structure having arrays of small, closely spaced features | Gurtej S. Sandhu | 2015-08-04 |
| 9003651 | Methods for integrated circuit fabrication with protective coating for planarization | David H. Wells, Baosuo Zhou, Krupakar M. Subramanian | 2015-04-14 |
| 8895232 | Mask material conversion | Gurtej S. Sandhu | 2014-11-25 |
| 8883644 | Single spacer process for multiplying pitch by a factor greater than two and related intermediate IC structures | David H. Wells | 2014-11-11 |
| 8852851 | Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same | Baosuo Zhou, Ardavan Niroomand, Paul A. Morgan, Shuang Meng, Joseph Neil Greeley +1 more | 2014-10-07 |
| 8834728 | Method and system for providing an energy assisted magnetic recording writer having a self aligned heat sink and NFT | Yufeng Hu, Shawn M. Tanner, Ut Tran, Zhongyan Wang | 2014-09-16 |
| 8721902 | Method and system for providing an energy assisted magnetic recording writer having a heat sink and NFT | Zhongyan Wang, Wei-Xin Gao, Shawn M. Tanner, Yanfeng Chen, Yufeng Hu | 2014-05-13 |
| 8598632 | Integrated circuit having pitch reduced patterns relative to photoithography features | Luan C. Tran, William T. Rericha, John Lee, Ramakanth Alapati, Sheron Honarkhah +7 more | 2013-12-03 |
| 8557704 | Single spacer process for multiplying pitch by a factor greater than two and related intermediate IC structures | David H. Wells | 2013-10-15 |
| 8486610 | Mask material conversion | Gurtej S. Sandhu | 2013-07-16 |
| 8479384 | Methods for integrated circuit fabrication with protective coating for planarization | David H. Wells, Baosuo Zhou, Krupakar M. Subramanian | 2013-07-09 |