Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791140 | Confinement ring for use in a plasma processing system | Rajinder Dhindsa, Akira Koshiishi | 2023-10-17 |
| 11342166 | Confinement ring for use in a plasma processing system | Rajinder Dhindsa, Akira Koshiishi | 2022-05-24 |
| 10720314 | Confinement ring for use in a plasma processing system | Rajinder Dhindsa, Akira Koshiishi | 2020-07-21 |
| 9881772 | Multi-radiofrequency impedance control for plasma uniformity tuning | Rajinder Dhindsa | 2018-01-30 |
| 9117767 | Negative ion control for dielectric etch | Mirzafer Abatchev, Rajinder Dhindsa, Eric A. Hudson, Andrew D. Bailey, III | 2015-08-25 |