Issued Patents All Time
Showing 1–25 of 151 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412736 | Methods and systems for managing byproduct material accumulation during plasma-based semiconductor wafer fabrication process | Leonid Belau, Alexei Marakhtanov, John Holland | 2025-09-09 |
| 12406852 | Profile optimization for high aspect ratio memory using an etch front metal catalyst | Leonid Belau | 2025-09-02 |
| 12354880 | High aspect ratio etch with infinite selectivity | Leonid Belau | 2025-07-08 |
| 12278112 | Multiple state pulsing for high aspect ratio etch | Aniruddha Joi, Nikhil Dole, Merrett Wong, Jay Sheth | 2025-04-15 |
| 12255052 | Process control for ion energy delivery using multiple generators and phase control | Ranadeep Bhowmick, Felix Kozakevich, Alexei Marakhtanov, John Holland | 2025-03-18 |
| 12249514 | Carbon based depositions used for critical dimension control during high aspect ratio feature etches and for forming protective layers | Jon Henri, Karthik S. Colinjivadi, Francis Sloan Roberts, Kapu Sirish Reddy, Samantha Tan +4 more | 2025-03-11 |
| 12217972 | Multi-state pulsing for achieving a balance between bow control and mask selectivity | Nikhil Dole, Merrett Wong, Sangheon Lee, Xiaoqiang Yao | 2025-02-04 |
| 11935730 | Systems and methods for cleaning an edge ring pocket | Scott Briggs, John Holland, Alexei Marakhtanov, Felix Kozakevich, Kenneth Lucchesi | 2024-03-19 |
| 11670486 | Pulsed plasma chamber in dual chamber configuration | Alexei Marakhtanov, Rajinder Dhindsa, Andrew D. Bailey, III | 2023-06-06 |
| 11594400 | Multi zone gas injection upper electrode system | Ryan Bise, Rajinder Dhindsa, Alexei Marakhtanov, Lumin Li, Sang Ki Nam +6 more | 2023-02-28 |
| 11313242 | Thin seal for an engine | Alan D. Cetel, Dilip Shah, Raymond Surace | 2022-04-26 |
| 11171011 | Method for etching an etch layer | Kalman Pelhos | 2021-11-09 |
| 11014145 | Core assembly including studded spacer | Tracy A. Propheter-Hinckley, James T. Auxier | 2021-05-25 |
| 10861708 | Three or more states for achieving high aspect ratio dielectric etch | Takumi Yanagawa, Nikhil Dole, Ranadeep Bhowmick, Felix Kozakevich, John Holland +2 more | 2020-12-08 |
| 10847374 | Method for etching features in a stack | Leonid Belau, Francis Sloan Roberts | 2020-11-24 |
| 10847375 | Selective atomic layer etching | Chia-Chun Wang, Andrew Clark Serino, Nerissa Draeger, Zhonghao Zhang | 2020-11-24 |
| 10815819 | Variable area turbine arrangement with secondary flow modulation | Raymond Surace | 2020-10-27 |
| 10808551 | Airfoil cooling circuits | Tracy A. Propheter-Hinckley, San Quach, Matthew A. Devore | 2020-10-20 |
| 10781716 | Blade outer air seal cooling scheme | Susan M. Tholen, Dominic J. Mongillo, Paul M. Lutjen, James N. Knapp, Virginia L. Ross +1 more | 2020-09-22 |
| 10741367 | Methods for processing substrates using a movable plasma confinement structure | — | 2020-08-11 |
| 10662779 | Gas turbine engine component with degradation cooling scheme | Tracy A. Propheter-Hinckley | 2020-05-26 |
| 10622195 | Multi zone gas injection upper electrode system | Ryan Bise, Rajinder Dhindsa, Alexei Marakhtanov, Lumin Li, Sang Ki Nam +6 more | 2020-04-14 |
| 10553399 | Pulsed plasma chamber in dual chamber configuration | Alexei Marakhtanov, Rajinder Dhindsa, Andrew D. Bailey, III | 2020-02-04 |
| 10541144 | Self-assembled monolayers as an etchant in atomic layer etching | — | 2020-01-21 |
| 10504744 | Three or more states for achieving high aspect ratio dielectric etch | Takumi Yanagawa, Nikhil Dole, Ranadeep Bhowmick, Felix Kozakevich, John Holland +2 more | 2019-12-10 |