| 12488992 |
High aspect ratio dielectric etch with chlorine |
Rui Takahashi, Yilun Li, Young-Hwa Oh, Wondong Lee, Leonid Belau +1 more |
2025-12-02 |
|
| 12479004 |
Selective attachment to enhance SiO2:SiNx etch selectivity |
Chengao Wang, Sumit Agarwal, Ryan James Gasvoda |
2025-11-25 |
|
| 12435412 |
High density, modulus, and hardness amorphous carbon films at low pressure |
Matthew Scott Weimer, Ragesh Puthenkovilakam, Gordon Alex Macdonald, Shanwan Zhang, Shau-Tarng Lee +5 more |
2025-10-07 |
|
| 12412736 |
Methods and systems for managing byproduct material accumulation during plasma-based semiconductor wafer fabrication process |
Leonid Belau, Alexei Marakhtanov, John Holland |
2025-09-09 |
|
| 12406852 |
Profile optimization for high aspect ratio memory using an etch front metal catalyst |
Leonid Belau |
2025-09-02 |
|
| 12354880 |
High aspect ratio etch with infinite selectivity |
Leonid Belau |
2025-07-08 |
|
| 12278112 |
Multiple state pulsing for high aspect ratio etch |
Aniruddha Joi, Nikhil Dole, Merrett Wong, Jay Sheth |
2025-04-15 |
|
| 12255052 |
Process control for ion energy delivery using multiple generators and phase control |
Ranadeep Bhowmick, Felix Kozakevich, Alexei Marakhtanov, John Holland |
2025-03-18 |
|
| 12249514 |
Carbon based depositions used for critical dimension control during high aspect ratio feature etches and for forming protective layers |
Jon Henri, Karthik S. Colinjivadi, Francis Sloan Roberts, Kapu Sirish Reddy, Samantha Tan +4 more |
2025-03-11 |
|
| 12217972 |
Multi-state pulsing for achieving a balance between bow control and mask selectivity |
Nikhil Dole, Merrett Wong, Sangheon Lee, Xiaoqiang Yao |
2025-02-04 |
|
| 11935730 |
Systems and methods for cleaning an edge ring pocket |
Scott Briggs, John Holland, Alexei Marakhtanov, Felix Kozakevich, Kenneth Lucchesi |
2024-03-19 |
$316,293,000 |
| 11670486 |
Pulsed plasma chamber in dual chamber configuration |
Alexei Marakhtanov, Rajinder Dhindsa, Andrew D. Bailey, III |
2023-06-06 |
$175,488,000 |
| 11594400 |
Multi zone gas injection upper electrode system |
Ryan Bise, Rajinder Dhindsa, Alexei Marakhtanov, Lumin Li, Sang Ki Nam +6 more |
2023-02-28 |
$186,503,000 |
| 11313242 |
Thin seal for an engine |
Alan D. Cetel, Dilip Shah, Raymond Surace |
2022-04-26 |
$41,697,000 |
| 11171011 |
Method for etching an etch layer |
Kalman Pelhos |
2021-11-09 |
$241,076,000 |
| 11014145 |
Core assembly including studded spacer |
Tracy A. Propheter-Hinckley, James T. Auxier |
2021-05-25 |
$30,974,000 |
| 10861708 |
Three or more states for achieving high aspect ratio dielectric etch |
Takumi Yanagawa, Nikhil Dole, Ranadeep Bhowmick, Felix Kozakevich, John Holland +2 more |
2020-12-08 |
$340,081,000 |
| 10847374 |
Method for etching features in a stack |
Leonid Belau, Francis Sloan Roberts |
2020-11-24 |
$86,472,000 |
| 10847375 |
Selective atomic layer etching |
Chia-Chun Wang, Andrew Clark Serino, Nerissa Draeger, Zhonghao Zhang |
2020-11-24 |
$86,472,000 |
| 10815819 |
Variable area turbine arrangement with secondary flow modulation |
Raymond Surace |
2020-10-27 |
$12,560,000 |
| 10808551 |
Airfoil cooling circuits |
Tracy A. Propheter-Hinckley, San Quach, Matthew A. Devore |
2020-10-20 |
$13,954,000 |
| 10781716 |
Blade outer air seal cooling scheme |
Susan M. Tholen, Dominic J. Mongillo, Paul M. Lutjen, James N. Knapp, Virginia L. Ross +1 more |
2020-09-22 |
$36,922,000 |
| 10741367 |
Methods for processing substrates using a movable plasma confinement structure |
— |
2020-08-11 |
$65,940,000 |
| 10662779 |
Gas turbine engine component with degradation cooling scheme |
Tracy A. Propheter-Hinckley |
2020-05-26 |
$24,050,000 |
| 10622195 |
Multi zone gas injection upper electrode system |
Ryan Bise, Rajinder Dhindsa, Alexei Marakhtanov, Lumin Li, Sang Ki Nam +6 more |
2020-04-14 |
$56,328,000 |
