Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12266535 | Mask encapsulation to prevent degradation during fabrication of high aspect ratio features | Jon Henri, Francis Sloan Roberts | 2025-04-01 |
| 12249514 | Carbon based depositions used for critical dimension control during high aspect ratio feature etches and for forming protective layers | Jon Henri, Karthik S. Colinjivadi, Francis Sloan Roberts, Samantha Tan, Shih-Ked Lee +4 more | 2025-03-11 |
| 11869770 | Selective deposition of etch-stop layer for enhanced patterning | Nagraj Shankar, Jon Henri, Pengyi Zhang, Elham Mohimi, Bhavin Jariwala +1 more | 2024-01-09 |
| 11094542 | Selective deposition of etch-stop layer for enhanced patterning | Nagraj Shankar, Jon Henri, Pengyi Zhang, Elham Mohimi, Bhavin Jariwala +1 more | 2021-08-17 |
| 10998187 | Selective deposition with atomic layer etch reset | Meliha Gozde Rainville, Nagraj Shankar, Dennis M. Hausmann, David Charles Smith, Karthik Sivaramakrishnan +1 more | 2021-05-04 |
| 10804144 | Deposition of aluminum oxide etch stop layers | Meliha Gozde Rainville, Nagraj Shankar, Dennis M. Hausmann | 2020-10-13 |
| 10745806 | Showerhead with air-gapped plenums and overhead isolation gas distributor | Nagraj Shankar, Jeffrey Womack, Meliha Gozde Rainville, Emile C. Draper, Pankaj G. Ramnani +3 more | 2020-08-18 |
| 10665501 | Deposition of Aluminum oxide etch stop layers | Meliha Gozde Rainville, Nagraj Shankar, Dennis M. Hausmann | 2020-05-26 |
| 10651080 | Oxidizing treatment of aluminum nitride films in semiconductor device manufacturing | Meliha Gozde Rainville, Nagraj Shankar, Daniel Damjanovic | 2020-05-12 |
| 10643889 | Pre-treatment method to improve selectivity in a selective deposition process | Dennis M. Hausmann, Elham Mohimi, Pengyi Zhang, Paul C. Lemaire, Kashish Sharma +3 more | 2020-05-05 |
| 10566194 | Selective deposition of etch-stop layer for enhanced patterning | Nagraj Shankar, Jon Henri, Pengyi Zhang, Elham Mohimi, Bhavin Jariwala +1 more | 2020-02-18 |
| 10559461 | Selective deposition with atomic layer etch reset | Meliha Gozde Rainville, Nagraj Shankar, Dennis M. Hausmann, David Charles Smith, Karthik Sivaramakrishnan +1 more | 2020-02-11 |
| 10472716 | Showerhead with air-gapped plenums and overhead isolation gas distributor | Nagraj Shankar, Jeffrey Womack, Meliha Gozde Rainville, Emile C. Draper, Pankaj G. Ramnani +3 more | 2019-11-12 |
| 10418236 | Composite dielectric interface layers for interconnect structures | Nagraj Shankar, Shankar Swaminathan, Meliha Gozde Rainville, Frank L. Pasquale | 2019-09-17 |
| 10049869 | Composite dielectric interface layers for interconnect structures | Nagraj Shankar, Shankar Swaminathan, Meliha Gozde Rainville, Frank L. Pasquale | 2018-08-14 |
| 9859153 | Deposition of aluminum oxide etch stop layers | Meliha Gozde Rainville, Nagraj Shankar, Dennis M. Hausmann | 2018-01-02 |
| 9847221 | Low temperature formation of high quality silicon oxide films in semiconductor device manufacturing | Kevin McLaughlin, Amit Pharkya | 2017-12-19 |