Issued Patents All Time
Showing 1–25 of 84 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354877 | Vapor deposition of films comprising molybdenum | Bhushan Zope, Eric Christopher Stevens, Eric James Shero, Robert Brennan Milligan | 2025-07-08 |
| 12293911 | Structure including SiOCN layer and method of forming same | YoungChol Byun, Bed Prasad Sharma, Eric James Shero | 2025-05-06 |
| 12261038 | Gapfill of variable aspect ratio features with a composite PEALD and PECVD method | Hu Kang, Jun Qian, Wanki Kim, Dennis M. Hausmann, Bart J. van Schravendijk +1 more | 2025-03-25 |
| 12215416 | Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film | Eric Christopher Stevens, Bhushan Zope, Charles Dezelah, Qi Xie, Giuseppe Alessio Verni | 2025-02-04 |
| 12203166 | Apparatus and methods for performing an in-situ etch of reaction chambers with fluorine-based radicals | Amit Mishra, Bhushan Zope, Theodorus G.M. Oosterlaken | 2025-01-21 |
| 12033885 | Channeled lift pin | Govindarajasekhar Singu, Dinkar Nandwana, Todd Robert Dunn, Bhushan Zope, Carl Louis White | 2024-07-09 |
| 11959175 | Fill on demand ampoule refill | Tuan Nguyen, Eashwar Ranganathan, Adrien LaVoie, Chloe Baldasseroni, Ramesh Chandrasekharan +2 more | 2024-04-16 |
| 11946136 | Semiconductor processing device | Jereld Lee Winkler, Eric James Shero, Carl Louis White, Bhushan Zope | 2024-04-02 |
| 11908736 | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures | Bhushan Zope, Kiran Shrestha, Chiyu Zhu, Henri Jussila, Qi Xie | 2024-02-20 |
| 11901175 | Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer | Eric James Shero, Paul F. Ma, Bed Prasad Sharma | 2024-02-13 |
| 11898242 | Methods for forming a polycrystalline molybdenum film over a surface of a substrate and related structures including a polycrystalline molybdenum film | Bhushan Zope, Eric Christopher Stevens, Roghayyeh Lotfi, Mustafa Muhammad, Eric James Shero | 2024-02-13 |
| 11827978 | Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film | Eric Christopher Stevens, Bhushan Zope, Charles Dezelah, Qi Xie, Giuseppe Alessio Verni | 2023-11-28 |
| 11742198 | Structure including SiOCN layer and method of forming same | YoungChol Byun, Bed Prasad Sharma, Eric James Shero | 2023-08-29 |
| 11581220 | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures | Bhushan Zope, Kiran Shrestha, Chiyu Zhu, Henri Jussila, Qi Xie | 2023-02-14 |
| 11443975 | Planar substrate edge contact with open volume equalization pathways and side containment | Patrick Breiling, Ramesh Chandrasekharan, Karl Leeser, Paul Konkola, Adrien LaVoie +7 more | 2022-09-13 |
| 11424119 | Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer | Eric James Shero, Paul F. Ma, Bed Prasad Sharma | 2022-08-23 |
| 11295980 | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures | Bhushan Zope, Kiran Shrestha, Chiyu Zhu, Henri Jussila, Qi Xie | 2022-04-05 |
| 11286558 | Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film | Eric Christopher Stevens, Bhushan Zope, Charles Dezelah, Qi Xie, Giuseppe Alessio Verni | 2022-03-29 |
| 11133180 | Gapfill of variable aspect ratio features with a composite PEALD and PECVD method | Hu Kang, Jun Qian, Wanki Kim, Dennis M. Hausmann, Bart J. van Schravendijk +1 more | 2021-09-28 |
| 11127567 | Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity | Hu Kang, Adrien LaVoie, Jun Qian, Chloe Baldasseroni, Frank L. Pasquale +8 more | 2021-09-21 |
| 11120989 | Systems and methods for UV-based suppression of plasma instability | — | 2021-09-14 |
| 11114294 | Structure including SiOC layer and method of forming same | Bed Prasad Sharma, YoungChol Byun, Eric James Shero | 2021-09-07 |
| 11072860 | Fill on demand ampoule refill | Tuan Nguyen, Eashwar Ranganathan, Adrien LaVoie, Chloe Baldasseroni, Ramesh Chandrasekharan +2 more | 2021-07-27 |
| 11011379 | Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors | Reza Arghavani, Samantha Tan, Bhadri N. Varadarajan, Adrien LaVoie, Ananda Banerji +1 more | 2021-05-18 |
| 10840061 | Substrate processing chamber including conical surface for reducing recirculation | Richard Phillips, Ryan Blaquiere | 2020-11-17 |