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Pedestals for modulating film properties in atomic layer deposition (ALD) substrate processing chambers |
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Substrate processing chamber including conical surface for reducing recirculation |
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| 10697059 |
Thickness compensation by modulation of number of deposition cycles as a function of chamber accumulation for wafer to wafer film thickness matching |
Chloe Baldasseroni, Nishanth Manjunath |
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| 10658172 |
Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layer |
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Doped ALD films for semiconductor patterning applications |
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Methods and apparatuses for increasing reactor processing batch size |
Pulkit Agarwal, Purushottam Kumar, Adrien LaVoie |
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Collar, conical showerheads and/or top plates for reducing recirculation in a substrate processing system |
Ryan Blaquiere, Shankar Swaminathan |
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| 10269559 |
Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layer |
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Protective vest |
— |
2002-06-25 |
| 5903490 |
Customizable integrated circuit device |
Eran Rotem, Uzi Yoeli |
1999-05-11 |
| 5306970 |
Sense amplifier and method for its operation |
— |
1994-04-26 |
| 5187429 |
Reference voltage generator for dynamic random access memory |
— |
1993-02-16 |
| 5148165 |
CMOS digital to analog signal converter circuit |
— |
1992-09-15 |
