| 12473633 |
Plasma enhanced atomic layer deposition of silicon-containing films |
Ravi Kumar, Adrien LaVoie, Dustin Zachary Austin, Joseph R. Abel, Douglas Walter Agnew +1 more |
2025-11-18 |
|
| 12451346 |
Modulated atomic layer deposition |
Chan Myae Myae Soe, Chloe Baldasseroni, Shiva Sharan Bhandari, Adrien LaVoie, Bart J. van Schravendijk |
2025-10-21 |
|
| 12322619 |
Dynamic process control in semiconductor manufacturing |
Purushottam Kumar, Tengfei Miao, Gengwei Jiang, Daniel Ho, Joseph R. Abel +1 more |
2025-06-03 |
|
| 12308264 |
Rapid tuning of critical dimension non-uniformity by modulating temperature transients of multi-zone substrate supports |
Ravi Kumar, Adrien LaVoie, Ramesh Chandrasekharan, Michael Philip Roberts |
2025-05-20 |
|
| 12209312 |
Temperature control of a multi-zone pedestal |
Ramesh Chandrasekharan, Michael Philip Roberts, Aaron Bingham, Ashish Saurabh, Adrien LaVoie +1 more |
2025-01-28 |
|
| 12186851 |
Use of vacuum during transfer of substrates |
Ramesh Chandrasekharan, Michael Philip Roberts, Paul Konkola, Michael G. R. Smith, Brian Joseph Williams +2 more |
2025-01-07 |
|
| 12071689 |
Trim and deposition profile control with multi-zone heated substrate support for multi-patterning processes |
Ramesh Chandrasekharan, Michael Philip Roberts, Adrien LaVoie, Ravi Kumar, Nuoya Yang +2 more |
2024-08-27 |
$110,858,000 |
| 12057300 |
Apparatus for cleaning plasma chambers |
Adrien LaVoie, Frank L. Pasquale, Purushottam Kumar |
2024-08-06 |
$253,939,000 |
| 12040181 |
Modulated atomic layer deposition |
Chan Myae Myae Soe, Chloe Baldasseroni, Shiva Sharan Bhandari, Adrien LaVoie, Bart J. van Schravendijk |
2024-07-16 |
$133,340,000 |
| 11913113 |
Method and apparatus for modulating film uniformity |
Adrien LaVoie, Purushottam Kumar |
2024-02-27 |
$293,347,000 |
| 11651963 |
Method of improving deposition induced CD imbalance using spatially selective ashing of carbon based film |
Ishtak Karim, Joseph R. Abel, Purushottam Kumar, Adrien LaVoie |
2023-05-16 |
$349,354,000 |
| 11542599 |
Method and apparatus for providing station to station uniformity |
Adrien LaVoie |
2023-01-03 |
$253,745,000 |
| 11520828 |
Methods for representing and storing data in a graph data structure using artificial intelligence |
Santanu Chakrabarty, Ajitha C, Siddhant Lahoti |
2022-12-06 |
$6,201,000 |
| 11322416 |
Controller for controlling core critical dimension variation using flash trim sequence |
Adrien LaVoie, Ravi Kumar, Purushottam Kumar |
2022-05-03 |
$251,737,000 |
| 11236422 |
Multi zone substrate support for ALD film property correction and tunability |
Michael Philip Roberts, Ramesh Chandrasekharan, Aaron Bingham, Ashish Saurabh, Ravi Kumar +1 more |
2022-02-01 |
$175,197,000 |
| 11078570 |
Azimuthal critical dimension non-uniformity for double patterning process |
Adrien LaVoie, Frank L. Pasquale, Ravi Kumar |
2021-08-03 |
$392,480,000 |
| 10978302 |
Method of improving deposition induced CD imbalance using spatially selective ashing of carbon based film |
Ishtak Karim, Joseph R. Abel, Purushottam Kumar, Adrien LaVoie |
2021-04-13 |
$221,486,000 |
| 10847352 |
Compensating chamber and process effects to improve critical dimension variation for trim process |
Adrien LaVoie, Ravi Kumar, Purushottam Kumar |
2020-11-24 |
$86,472,000 |
| 10801109 |
Method and apparatus for providing station to station uniformity |
Adrien LaVoie |
2020-10-13 |
$92,724,000 |
| 10727143 |
Method for controlling core critical dimension variation using flash trim sequence |
Adrien LaVoie, Ravi Kumar, Purushottam Kumar |
2020-07-28 |
$107,178,000 |
| 10658172 |
Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layer |
Joseph R. Abel, Richard Phillips, Purushottam Kumar, Adrien LaVoie |
2020-05-19 |
$40,560,000 |
| 10655224 |
Conical wafer centering and holding device for semiconductor processing |
Ishtak Karim, Purushottam Kumar, Adrien LaVoie, Sung Je Kim, Patrick Breiling |
2020-05-19 |
$40,560,000 |
| 10579371 |
Recommendations for custom software upgrade by cognitive technologies |
Santanu Chakrabarty, Sivaranjani Kathirvel, Sivaraj Sethunamasivayam |
2020-03-03 |
$1,865,000 |
| 10494715 |
Atomic layer clean for removal of photoresist patterning scum |
Purushottam Kumar, Adrien LaVoie |
2019-12-03 |
$74,890,000 |
| 10431451 |
Methods and apparatuses for increasing reactor processing batch size |
Purushottam Kumar, Richard Phillips, Adrien LaVoie |
2019-10-01 |
$27,307,000 |
