Issued Patents All Time
Showing 25 most recent of 174 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12421602 | Multi-station semiconductor processing with independently adjustable pedestals | Frank L. Pasquale, Jennifer Leigh Petraglia, Dinesh Baskar | 2025-09-23 |
| 12412742 | Impurity reduction in silicon-containing films | Awnish Gupta, Bart J. van Schravendijk, Jason Alexander Varnell, Joseph R. Abel, Jennifer Leigh Petraglia | 2025-09-09 |
| 12354871 | Ultrathin atomic layer deposition film accuracy thickness control | Jun Qian, Hu Kang, Seiji Matsuyama, Purushottam Kumar | 2025-07-08 |
| 12308264 | Rapid tuning of critical dimension non-uniformity by modulating temperature transients of multi-zone substrate supports | Ravi Kumar, Pulkit Agarwal, Ramesh Chandrasekharan, Michael Philip Roberts | 2025-05-20 |
| 12278125 | Integrated dry processes for patterning radiation photoresist patterning | Jengyi Yu, Samantha Tan, Mohammed Haroon Alvi, Richard Wise, Yang Pan +5 more | 2025-04-15 |
| 12261038 | Gapfill of variable aspect ratio features with a composite PEALD and PECVD method | Hu Kang, Shankar Swaminathan, Jun Qian, Wanki Kim, Dennis M. Hausmann +1 more | 2025-03-25 |
| 12209312 | Temperature control of a multi-zone pedestal | Ramesh Chandrasekharan, Michael Philip Roberts, Aaron Bingham, Ashish Saurabh, Pulkit Agarwal +1 more | 2025-01-28 |
| 12186851 | Use of vacuum during transfer of substrates | Ramesh Chandrasekharan, Michael Philip Roberts, Paul Konkola, Michael G. R. Smith, Brian Joseph Williams +2 more | 2025-01-07 |
| 12183604 | Integrated dry processes for patterning radiation photoresist patterning | Jengyi Yu, Samantha Tan, Mohammed Haroon Alvi, Richard Wise, Yang Pan +5 more | 2024-12-31 |
| 12157945 | Thermal atomic layer deposition of silicon-containing films | Awnish Gupta, Tengfei Miao, Douglas Walter Agnew, Ian John Curtin | 2024-12-03 |
| 12142509 | Electrostatic chuck with seal surface | Patrick Breiling, Michael Philip Roberts, Chloe Baldasseroni, Ishtak Karim, Ramesh Chandrasekharan | 2024-11-12 |
| 12125705 | Method for providing doped silicon using a diffusion barrier layer | Purushottam Kumar, Gengwei Jiang, Bart J. van Schravendijk, Tengfei Miao, Joseph R. Abel | 2024-10-22 |
| 12110586 | Pedestals for modulating film properties in atomic layer deposition (ALD) substrate processing chambers | Michael Philip Roberts, Chloe Baldasseroni, Richard Phillips, Ramesh Chandrasekharan | 2024-10-08 |
| 12077859 | Variable cycle and time RF activation method for film thickness matching in a multi-station deposition system | Ishtak Karim, Kiyong Cho, Jaswinder Guliani, Purushottam Kumar, Jun Qian | 2024-09-03 |
| 12071689 | Trim and deposition profile control with multi-zone heated substrate support for multi-patterning processes | Ramesh Chandrasekharan, Michael Philip Roberts, Pulkit Agarwal, Ravi Kumar, Nuoya Yang +2 more | 2024-08-27 |
| 12057300 | Apparatus for cleaning plasma chambers | Pulkit Agarwal, Frank L. Pasquale, Purushottam Kumar | 2024-08-06 |
| 12049699 | Dielectric gapfill using atomic layer deposition (ALD), inhibitor plasma and etching | Joseph R. Abel, Purushottam Kumar, Bart J. van Schravendijk | 2024-07-30 |
| 12049698 | Systems and methods for reducing effluent build-up in a pumping exhaust system | Antonio Xavier, Steven Goza, Ramesh Chandrasekharan, Joseph Nesmith | 2024-07-30 |
| 12040181 | Modulated atomic layer deposition | Chan Myae Myae Soe, Chloe Baldasseroni, Shiva Sharan Bhandari, Pulkit Agarwal, Bart J. van Schravendijk | 2024-07-16 |
| 12037686 | Selective carbon deposition | Awnish Gupta, Bart J. van Schravendijk, Samantha Tan | 2024-07-16 |
| 12020923 | Low-κ ALD gap-fill methods and material | Joseph R. Abel, Douglas Walter Agnew, Ian John Curtin, Purushottam Kumar | 2024-06-25 |
| 11970772 | Dynamic precursor dosing for atomic layer deposition | Purushottam Kumar, Jun Qian, Hu Kang, Ishtak Karim, Fung Suong Ou | 2024-04-30 |
| 11959175 | Fill on demand ampoule refill | Tuan Nguyen, Eashwar Ranganathan, Shankar Swaminathan, Chloe Baldasseroni, Ramesh Chandrasekharan +2 more | 2024-04-16 |
| 11913113 | Method and apparatus for modulating film uniformity | Pulkit Agarwal, Purushottam Kumar | 2024-02-27 |
| 11670503 | Method of atomic layer deposition | Jun Qian, Hu Kang, Seiji Matsuyama, Purushottam Kumar | 2023-06-06 |