Issued Patents All Time
Showing 25 most recent of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12274047 | Line bending control for memory applications | Gorun Butail, Shruti Vivek Thombare, Patrick A. Van Cleemput | 2025-04-08 |
| 12142509 | Electrostatic chuck with seal surface | Patrick Breiling, Michael Philip Roberts, Chloe Baldasseroni, Adrien LaVoie, Ramesh Chandrasekharan | 2024-11-12 |
| 12077859 | Variable cycle and time RF activation method for film thickness matching in a multi-station deposition system | Kiyong Cho, Adrien LaVoie, Jaswinder Guliani, Purushottam Kumar, Jun Qian | 2024-09-03 |
| 11970772 | Dynamic precursor dosing for atomic layer deposition | Purushottam Kumar, Adrien LaVoie, Jun Qian, Hu Kang, Fung Suong Ou | 2024-04-30 |
| 11864372 | Line bending control for memory applications | Gorun Butail, Shruti Vivek Thombare, Patrick A. Van Cleemput | 2024-01-02 |
| 11651963 | Method of improving deposition induced CD imbalance using spatially selective ashing of carbon based film | Pulkit Agarwal, Joseph R. Abel, Purushottam Kumar, Adrien LaVoie | 2023-05-16 |
| 11443975 | Planar substrate edge contact with open volume equalization pathways and side containment | Patrick Breiling, Ramesh Chandrasekharan, Karl Leeser, Paul Konkola, Adrien LaVoie +7 more | 2022-09-13 |
| 11180850 | Dynamic precursor dosing for atomic layer deposition | Purushottam Kumar, Adrien LaVoie, Jun Qian, Hu Kang, Fung Suong Ou | 2021-11-23 |
| 10978302 | Method of improving deposition induced CD imbalance using spatially selective ashing of carbon based film | Pulkit Agarwal, Joseph R. Abel, Purushottam Kumar, Adrien LaVoie | 2021-04-13 |
| 10692717 | Minimization of carbon loss in ALD SiO2 deposition on hardmask films | Douglas Walter Agnew | 2020-06-23 |
| 10679848 | Selective atomic layer deposition with post-dose treatment | Purushottam Kumar, Adrien LaVoie, Jun Qian, Frank L. Pasquale, Bart J. van Schravendijk | 2020-06-09 |
| 10655224 | Conical wafer centering and holding device for semiconductor processing | Pulkit Agarwal, Purushottam Kumar, Adrien LaVoie, Sung Je Kim, Patrick Breiling | 2020-05-19 |
| 10622243 | Planar substrate edge contact with open volume equalization pathways and side containment | Patrick Breiling, Ramesh Chandrasekharan, Karl Leeser, Paul Konkola, Adrien LaVoie +7 more | 2020-04-14 |
| 10340136 | Minimization of carbon loss in ALD SiO2 deposition on hardmask films | Douglas Walter Agnew | 2019-07-02 |
| 10202691 | Showerhead curtain gas method and system for film profile modulation | Adrien LaVoie | 2019-02-12 |
| 10128160 | Systems and methods for detection of plasma instability by electrical measurement | Yukinori Sakiyama, Yaswanth Rangineni, Adrien LaVoie, Ramesh Chandrasekharan, Edward Augustyniak +1 more | 2018-11-13 |
| 10094018 | Dynamic precursor dosing for atomic layer deposition | Purushottam Kumar, Adrien LaVoie, Jun Qian, Hu Kang, Fung Suong Ou | 2018-10-09 |
| 10074543 | High dry etch rate materials for semiconductor patterning applications | Arpan Mahorowala, Purushottam Kumar, Shankar Swaminathan, Adrien LaVoie | 2018-09-11 |
| 10062563 | Selective atomic layer deposition with post-dose treatment | Purushottam Kumar, Adrien LaVoie, Jun Qian, Frank L. Pasquale, Bart J. van Schravendijk | 2018-08-28 |
| 10037884 | Selective atomic layer deposition for gapfill using sacrificial underlayer | Fung Suong Ou, Purushottam Kumar, Adrien LaVoie, Jun Qian | 2018-07-31 |
| 9997422 | Systems and methods for frequency modulation of radiofrequency power supply for controlling plasma instability | Yukinori Sakiyama, Yaswanth Rangineni, Edward Augustyniak, Douglas Keil, Ramesh Chandrasekharan +2 more | 2018-06-12 |
| 9941113 | Systems and methods for using electrical asymmetry effect to control plasma process space in semiconductor fabrication | Douglas Keil, Yaswanth Rangineni, Adrien LaVoie, Yukinori Sakiyama, Edward Augustyniak +2 more | 2018-04-10 |
| 9870917 | Variable temperature hardware and methods for reduction of wafer backside deposition | Hu Kang, Purushottam Kumar, Jun Qian, Ramesh Chandrasekharan, Adrien LaVoie | 2018-01-16 |
| 9824941 | Systems and methods for detection of plasma instability by electrical measurement | Yukinori Sakiyama, Yaswanth Rangineni, Adrien LaVoie, Ramesh Chandrasekharan, Edward Augustyniak +1 more | 2017-11-21 |
| 9738977 | Showerhead curtain gas method and system for film profile modulation | Adrien LaVoie | 2017-08-22 |