Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12143087 | Combiner and distributor for adjusting impedances or power across multiple plasma processing stations | Sunil Kapoor, George Thomas, Edward Augustyniak | 2024-11-12 |
| 12052006 | Mutually induced filters | Sunil Kapoor, Aaron W. Logan, Hyungjoon Kim, Karl Leeser | 2024-07-30 |
| 11258420 | Mutually induced filters | Sunil Kapoor, Aaron W. Logan, Hyungjoon Kim, Karl Leeser | 2022-02-22 |
| 11258421 | Combiner and distributor for adjusting impedances or power across multiple plasma processing stations | Sunil Kapoor, George Thomas, Edward Augustyniak | 2022-02-22 |
| 10879092 | Fault detection using showerhead voltage variation | Sunil Kapoor, Aaron Bingham, Tuan Nguyen | 2020-12-29 |
| 10637427 | Mutually induced filters | Sunil Kapoor, Aaron W. Logan, Hyungjoon Kim, Karl Leeser | 2020-04-28 |
| 10622962 | Combiner and distributor for adjusting impedances or power across multiple plasma processing stations | Sunil Kapoor, George Thomas, Edward Augustyniak | 2020-04-14 |
| 10187032 | Combiner and distributor for adjusting impedances or power across multiple plasma processing stations | Sunil Kapoor, George Thomas, Edward Augustyniak | 2019-01-22 |
| 10145010 | Multi-station plasma reactor with RF balancing | Sunil Kapoor, Karl Leeser, Adrien LaVoie | 2018-12-04 |
| 10128160 | Systems and methods for detection of plasma instability by electrical measurement | Yukinori Sakiyama, Ishtak Karim, Adrien LaVoie, Ramesh Chandrasekharan, Edward Augustyniak +1 more | 2018-11-13 |
| 10043690 | Fault detection using showerhead voltage variation | Sunil Kapoor, Aaron Bingham, Tuan Nguyen | 2018-08-07 |
| 10044338 | Mutually induced filters | Sunil Kapoor, Aaron W. Logan, Hyungjoon Kim, Karl Leeser | 2018-08-07 |
| 9997422 | Systems and methods for frequency modulation of radiofrequency power supply for controlling plasma instability | Ishtak Karim, Yukinori Sakiyama, Edward Augustyniak, Douglas Keil, Ramesh Chandrasekharan +2 more | 2018-06-12 |
| 9941113 | Systems and methods for using electrical asymmetry effect to control plasma process space in semiconductor fabrication | Douglas Keil, Ishtak Karim, Adrien LaVoie, Yukinori Sakiyama, Edward Augustyniak +2 more | 2018-04-10 |
| 9875883 | Metrology methods to detect plasma in wafer cavity and use of the metrology for station-to-station and tool-to-tool matching | Yukinori Sakiyama, Jeremy Tucker, Douglas Keil, Edward Augustyniak, Sunil Kapoor | 2018-01-23 |
| 9840776 | Multi-station plasma reactor with RF balancing | Sunil Kapoor, Karl Leeser, Adrien LaVoie | 2017-12-12 |
| 9824941 | Systems and methods for detection of plasma instability by electrical measurement | Yukinori Sakiyama, Ishtak Karim, Adrien LaVoie, Ramesh Chandrasekharan, Edward Augustyniak +1 more | 2017-11-21 |
| 9754769 | Metrology methods to detect plasma in wafer cavity and use of the metrology for station-to-station and tool-to-tool matching | Yukinori Sakiyama, Jeremy Tucker, Douglas Keil, Edward Augustyniak, Sunil Kapoor | 2017-09-05 |
| 9644271 | Systems and methods for using electrical asymmetry effect to control plasma process space in semiconductor fabrication | Douglas Keil, Ishtak Karim, Adrien LaVoie, Yukinori Sakiyama, Edward Augustyniak +2 more | 2017-05-09 |
| 9263350 | Multi-station plasma reactor with RF balancing | Sunil Kapoor, Karl Leeser, Adrien LaVoie | 2016-02-16 |