Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12209312 | Temperature control of a multi-zone pedestal | Ramesh Chandrasekharan, Michael Philip Roberts, Ashish Saurabh, Adrien LaVoie, Pulkit Agarwal +1 more | 2025-01-28 |
| 11594397 | Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system | Eller Y. Juco, Karl Leeser, David French, Sunil Kapoor, David Alan Metz +3 more | 2023-02-28 |
| 11354005 | Methods, systems, and media for presenting annotations across multiple videos | Silviu Bota, Raul Evelio Vera, Dror Shimshowitz | 2022-06-07 |
| 11236422 | Multi zone substrate support for ALD film property correction and tunability | Michael Philip Roberts, Ramesh Chandrasekharan, Pulkit Agarwal, Ashish Saurabh, Ravi Kumar +1 more | 2022-02-01 |
| 10991550 | Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system | Eller Y. Juco, Karl Leeser, David French, Sunil Kapoor, David Alan Metz +3 more | 2021-04-27 |
| 10879092 | Fault detection using showerhead voltage variation | Sunil Kapoor, Yaswanth Rangineni, Tuan Nguyen | 2020-12-29 |
| 10777386 | Methods for controlling plasma glow discharge in a plasma chamber | Patrick A. Van Cleemput | 2020-09-15 |
| 10620771 | Methods, systems, and media for presenting annotations across multiple videos | Silviu Bota, Raul Evelio Vera, Dror Shimshowitz | 2020-04-14 |
| 10061482 | Methods, systems, and media for presenting annotations across multiple videos | Silviu Bota, Raul Evelio Vera, Dror Shimshowitz | 2018-08-28 |
| 10043690 | Fault detection using showerhead voltage variation | Sunil Kapoor, Yaswanth Rangineni, Tuan Nguyen | 2018-08-07 |
| 10042505 | Methods, systems, and media for presenting annotations across multiple videos | Silviu Bota, Raul Evelio Vera, Dror Shimshowitz | 2018-08-07 |
| 8962101 | Methods and apparatus for plasma-based deposition | Pramod Subramonium, Tim Thomas, Jon Henri, Greg Farhner | 2015-02-24 |