Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12209312 | Temperature control of a multi-zone pedestal | Ramesh Chandrasekharan, Michael Philip Roberts, Aaron Bingham, Adrien LaVoie, Pulkit Agarwal +1 more | 2025-01-28 |
| 12071689 | Trim and deposition profile control with multi-zone heated substrate support for multi-patterning processes | Ramesh Chandrasekharan, Michael Philip Roberts, Pulkit Agarwal, Adrien LaVoie, Ravi Kumar +2 more | 2024-08-27 |
| 11236422 | Multi zone substrate support for ALD film property correction and tunability | Michael Philip Roberts, Ramesh Chandrasekharan, Pulkit Agarwal, Aaron Bingham, Ravi Kumar +1 more | 2022-02-01 |