Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12410519 | Automated showerhead tilt adjustment | Sam Jafarian Tehrani, Bryan Anthony Cmelak, Bin Luo, John Wiltse | 2025-09-09 |
| 11742229 | Auto-calibration to a station of a process module that spins a wafer | Richard M. Blank, Peter Thaulad, Paul Konkola | 2023-08-29 |
| 11594397 | Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system | Eller Y. Juco, Karl Leeser, David French, Sunil Kapoor, Aaron Bingham +3 more | 2023-02-28 |
| 11512393 | Dynamic sheath control with edge ring lift | Richard M. Blank, Curtis Bailey, Michael J. Janicki | 2022-11-29 |
| 11239100 | Auto-calibration to a station of a process module that spins a wafer | Richard M. Blank, Peter Thaulad, Paul Konkola | 2022-02-01 |
| 10991550 | Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system | Eller Y. Juco, Karl Leeser, David French, Sunil Kapoor, Aaron Bingham +3 more | 2021-04-27 |
| 10651065 | Auto-calibration to a station of a process module that spins a wafer | Richard M. Blank, Peter Thaulad, Paul Konkola | 2020-05-12 |
| 10233556 | Dynamic modulation of cross flow manifold during electroplating | Gabriel Hay Graham, Lee Peng Chua, Bryan L. Buckalew | 2019-03-19 |
| 9349629 | Touch auto-calibration of process modules | Richard M. Blank, Peter Thaulad | 2016-05-24 |