Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12341040 | Integrated adaptive positioning systems and routines for automated wafer-handling robot teach and health check | Hossein Sadeghi, Richard M. Blank, Mark E. Emerson, Arulselvam Simon Jeyapalan, Marco Piccigallo | 2025-06-24 |
| 12168301 | Fixture for automatic calibration of substrate transfer robot | Richard M. Blank, Aravind Alwan, Behnam BEHZIZ, Mark E. Emerson | 2024-12-17 |
| 11742229 | Auto-calibration to a station of a process module that spins a wafer | Jacob L. Hiester, Richard M. Blank, Paul Konkola | 2023-08-29 |
| 11581214 | Enhanced automatic wafer centering system and techniques for same | Brett M. Herzig, Richard M. Blank, Benjamin W. Mooring | 2023-02-14 |
| 11239100 | Auto-calibration to a station of a process module that spins a wafer | Jacob L. Hiester, Richard M. Blank, Paul Konkola | 2022-02-01 |
| 10796940 | Enhanced automatic wafer centering system and techniques for same | Brett M. Herzig, Richard M. Blank, Benjamin W. Mooring | 2020-10-06 |
| 10651065 | Auto-calibration to a station of a process module that spins a wafer | Jacob L. Hiester, Richard M. Blank, Paul Konkola | 2020-05-12 |
| 10509052 | Smart vibration wafer with optional integration with semiconductor processing tool | Arulselvam Simon Jeyapalan, Richard M. Blank, Tyson Ringold, Victor Eduardo Espinosa, III | 2019-12-17 |
| 9831110 | Vision-based wafer notch position measurement | Gustavo G. Francken, Brandon Senn, Zhuozhi Chen, Richard K. Lyons, Christian DiPietro +1 more | 2017-11-28 |
| 9349629 | Touch auto-calibration of process modules | Richard M. Blank, Jacob L. Hiester | 2016-05-24 |
| 7811153 | High throughput servo load cup with integrated wet chemistry delivery | Rich Blank, Wayne Tang, Kevin Bertsch, Paul Franzen, Ken Reynolds | 2010-10-12 |
| 7405531 | Torque-position transformer for task control of position controlled robots | Oussama Khatib, Jaehoung Park | 2008-07-29 |
| 7211979 | Torque-position transformer for task control of position controlled robots | Oussama Khatib, Jaehoung Park | 2007-05-01 |