Issued Patents All Time
Showing 25 most recent of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12341040 | Integrated adaptive positioning systems and routines for automated wafer-handling robot teach and health check | Hossein Sadeghi, Peter Thaulad, Mark E. Emerson, Arulselvam Simon Jeyapalan, Marco Piccigallo | 2025-06-24 |
| 12322641 | Mechanical indexer for multi-station process module | Michael Nordin, Karl Leeser, Robert Sculac, Damien Slevin | 2025-06-03 |
| 12272583 | Reduced footprint wafer handling platform | Christopher W. Burkhart, Richard H. Gould, Candi Kristoffersen, Michael Nordin, Hironobu Yasuumi | 2025-04-08 |
| 12168301 | Fixture for automatic calibration of substrate transfer robot | Aravind Alwan, Behnam BEHZIZ, Peter Thaulad, Mark E. Emerson | 2024-12-17 |
| 11908714 | Transfer robot for reduced footprint platform architecture | Richard H. Gould | 2024-02-20 |
| 11833662 | Wafer handling robot with radial gas curtain and/or interior volume control | Charles N. Ditmore | 2023-12-05 |
| 11742229 | Auto-calibration to a station of a process module that spins a wafer | Jacob L. Hiester, Peter Thaulad, Paul Konkola | 2023-08-29 |
| 11699610 | Rotational indexer with additional rotational axes | Karl Leeser | 2023-07-11 |
| 11581214 | Enhanced automatic wafer centering system and techniques for same | Peter Thaulad, Brett M. Herzig, Benjamin W. Mooring | 2023-02-14 |
| 11521869 | Reduced footprint platform architecture with linear vacuum transfer module | Richard H. Gould | 2022-12-06 |
| 11512393 | Dynamic sheath control with edge ring lift | Jacob L. Hiester, Curtis Bailey, Michael J. Janicki | 2022-11-29 |
| 11482436 | Rotational indexer with additional rotational axes | Karl Leeser | 2022-10-25 |
| 11239100 | Auto-calibration to a station of a process module that spins a wafer | Jacob L. Hiester, Peter Thaulad, Paul Konkola | 2022-02-01 |
| 11024531 | Optimized low energy / high productivity deposition system | Michael Nordin, Karl Leeser, Robert Sculac | 2021-06-01 |
| 10796940 | Enhanced automatic wafer centering system and techniques for same | Peter Thaulad, Brett M. Herzig, Benjamin W. Mooring | 2020-10-06 |
| 10651065 | Auto-calibration to a station of a process module that spins a wafer | Jacob L. Hiester, Peter Thaulad, Paul Konkola | 2020-05-12 |
| 10515834 | Multi-station tool with wafer transfer microclimate systems | Mohsen Salek, Richard H. Gould, Efrain Quiles | 2019-12-24 |
| 10509052 | Smart vibration wafer with optional integration with semiconductor processing tool | Peter Thaulad, Arulselvam Simon Jeyapalan, Tyson Ringold, Victor Eduardo Espinosa, III | 2019-12-17 |
| 10483142 | Vacuum robot positioning system with reduced sensitivity to chamber pressure | Mark Tan, Christopher W. Burkhart, Richard H. Gould | 2019-11-19 |
| 10155309 | Wafer handling robots with rotational joint encoders | — | 2018-12-18 |
| 10109517 | Rotational indexer with additional rotational axes | Karl Leeser | 2018-10-23 |
| 9576833 | Robot for a substrate processing system | Matt McLellan | 2017-02-21 |
| 9472432 | Dedicated hot and cold end effectors for improved throughput | — | 2016-10-18 |
| 9349629 | Touch auto-calibration of process modules | Peter Thaulad, Jacob L. Hiester | 2016-05-24 |
| 9299598 | Robot with integrated aligner | — | 2016-03-29 |