Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11989027 | Dual-mode autonomous guided vehicle | Christopher W. Burkhart | 2024-05-21 |
| 11833662 | Wafer handling robot with radial gas curtain and/or interior volume control | Richard M. Blank | 2023-12-05 |
| 7758404 | Apparatus for cleaning edge of substrate and method for using the same | Jason A. Ryder, Ji Zhu, Mark Wilcoxson, Fritz Redeker, John Parks +1 more | 2010-07-20 |