Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12272583 | Reduced footprint wafer handling platform | Richard H. Gould, Candi Kristoffersen, Michael Nordin, Richard M. Blank, Hironobu Yasuumi | 2025-04-08 |
| 11989027 | Dual-mode autonomous guided vehicle | Charles N. Ditmore | 2024-05-21 |
| 11282737 | Moving substrate transfer chamber | Daniel Arthur Brown, Leonard J. Sharpless, Allan K. Ronne | 2022-03-22 |
| 10794519 | Additively manufactured gas distribution manifold | Andrew C. Lee, David Hemker | 2020-10-06 |
| 10483142 | Vacuum robot positioning system with reduced sensitivity to chamber pressure | Mark Tan, Richard M. Blank, Richard H. Gould | 2019-11-19 |
| 10215317 | Additively manufactured gas distribution manifold | Andrew C. Lee, David Hemker | 2019-02-26 |
| 9879795 | Additively manufactured gas distribution manifold | Andrew C. Lee | 2018-01-30 |
| 7754014 | Gas-purged vacuum valve | Lawrence Gochberg | 2010-07-13 |
| 7585370 | Gas-purged vacuum valve | Lawrence Gochberg | 2009-09-08 |
| 6722665 | MESC seal, O-ring carrier | Keith Wood | 2004-04-20 |
| 6682295 | Flatted object passive aligner | Richard M. Blank | 2004-01-27 |
| 6602346 | Gas-purged vacuum valve | Lawrence Gochberg | 2003-08-05 |
| 5925411 | Gas-based substrate deposition protection | Everhardus P. van de Ven, Eliot K. Broadbent, Jeffrey C. Benzing, Barry Chin | 1999-07-20 |
| 5882417 | Apparatus for preventing deposition on frontside peripheral region and edge of wafer in chemical vapor deposition apparatus | Everhardus P. van de Ven, Eliot K. Broadbent, Jeffrey C. Benzing, Barry Chin, Lawrence C. Lane +1 more | 1999-03-16 |
| 5843233 | Exclusion guard and gas-based substrate protection for chemical vapor deposition apparatus | Everhardus P. van de Ven, Eliot K. Broadbent, Jeffrey C. Benzing, Barry Chin, Lawrence C. Lane +1 more | 1998-12-01 |
| 5772736 | Device for removing dissolved gas from a liquid | Bart J. van Schravendijk, Tito H. Santiago, Charles E. Pomeroy, Jeffrey W. Lind | 1998-06-30 |
| 5769951 | Exclusion guard and gas-based substrate protection for chemical vapor deposition apparatus | Everhardus P. van de Ven, Eliot K. Broadbent, Jeffrey C. Benzing, Barry Chin, Lawrence C. Lane | 1998-06-23 |
| 5645625 | Device for removing dissolved gas from a liquid | Bart J. van Schravendijk, Tito H. Santiago, Charles E. Pomeroy, Jeffrey W. Lind | 1997-07-08 |
| 5620525 | Apparatus for supporting a substrate and introducing gas flow doximate to an edge of the substrate | Everhardus P. van de Ven, Eliot K. Broadbent, Jeffrey C. Benzing, Barry Chin | 1997-04-15 |
| 5578532 | Wafer surface protection in a gas deposition process | Everhardus P. van de Ven, Eliot K. Broadbent, Jeffrey C. Benzing, Barry Chin | 1996-11-26 |
| 5425803 | Device for removing dissolved gas from a liquid | Bart J. van Schravendijk, Tito H. Santiago, Charles E. Pomeroy, Jeffrey W. Lind | 1995-06-20 |
| 5374594 | Gas-based backside protection during substrate processing | Everhardus P. van de Ven, Eliot K. Broadbent, Jeffrey C. Benzing, Barry Chin | 1994-12-20 |
| 5238499 | Gas-based substrate protection during processing | Everhardus P. van de Ven, Eliot K. Broadbent, Jeffrey C. Benzing, Barry Chin | 1993-08-24 |
| 5230741 | Gas-based backside protection during substrate processing | Everhardus P. van de Ven, Eliot K. Broadbent, Jeffrey C. Benzing, Barry Chin | 1993-07-27 |
| 4575069 | Sheet feeding mechanism | — | 1986-03-11 |