Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12107733 | Systems and methods for creating virtual devices | Yeqing Lou, Yun Zhang, Dongsheng Song | 2024-10-01 |
| 11729061 | Systems and methods for creating virtual devices | Yeqing Lou, Yun Zhang, Dongsheng Song | 2023-08-15 |
| 11374819 | Systems and methods for creating virtual devices | Yeqing Lou, Yun Zhang, Dongsheng Song | 2022-06-28 |
| 10483142 | Vacuum robot positioning system with reduced sensitivity to chamber pressure | Christopher W. Burkhart, Richard M. Blank, Richard H. Gould | 2019-11-19 |
| 8985935 | Mass damper for semiconductor wafer handling end effector | Nicholas Michael Kopec, Richard M. Blank | 2015-03-24 |
| 6976400 | Method and apparatus for damping vibrations in a semiconductor wafer handling arm | — | 2005-12-20 |
| 6761085 | Method and apparatus for damping vibrations in a semiconductor wafer handling arm | — | 2004-07-13 |