Issued Patents All Time
Showing 1–25 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12272583 | Reduced footprint wafer handling platform | Christopher W. Burkhart, Candi Kristoffersen, Michael Nordin, Richard M. Blank, Hironobu Yasuumi | 2025-04-08 |
| 11908714 | Transfer robot for reduced footprint platform architecture | Richard M. Blank | 2024-02-20 |
| 11764086 | Wafer transport assembly with integrated buffers | David Trussell, John Daugherty, Christopher Pena, Michael C. Kellogg, Klay Kunkel | 2023-09-19 |
| 11521869 | Reduced footprint platform architecture with linear vacuum transfer module | Richard M. Blank | 2022-12-06 |
| 11393705 | Wafer transport assembly with integrated buffers | John Daugherty, David Trussell, Michael C. Kellogg, Christopher Pena, Klay Kunkel | 2022-07-19 |
| 10790174 | Wafer transport assembly with integrated buffers | John Daugherty, David Trussell, Michael C. Kellogg, Christopher Pena, Klay Kunkel | 2020-09-29 |
| 10593583 | Integrated systems for interfacing with substrate container storage systems | Anthony C. Bonora, Michael Krolak | 2020-03-17 |
| 10566216 | Equipment front end module gas recirculation | Brandon Senn, Peter R. Wassei, Scott Wong, Silvia Rocio Aguilar Amaya, Todd A. Lopes +2 more | 2020-02-18 |
| 10559483 | Platform architecture to improve system productivity | Candi Kristoffersen, Gustavo G. Francken, James Van Gogh, Benjamin W. Mooring | 2020-02-11 |
| 10515834 | Multi-station tool with wafer transfer microclimate systems | Mohsen Salek, Richard M. Blank, Efrain Quiles | 2019-12-24 |
| 10483142 | Vacuum robot positioning system with reduced sensitivity to chamber pressure | Mark Tan, Christopher W. Burkhart, Richard M. Blank | 2019-11-19 |
| 10304707 | Load lock interface and integrated post-processing module | David Trussell, John Daugherty | 2019-05-28 |
| 10297480 | Buffer station with single exit-flow direction | Martin Robert Maraschin, Derek John Witkowicki | 2019-05-21 |
| 10249521 | Wet-dry integrated wafer processing system | Thorsten Lill, Andreas Fischer, Michael Myslovaty, Philipp Engesser, Harald Okorn-Schmidt +1 more | 2019-04-02 |
| 10153282 | Ultra-high vacuum transport and storage | Theodoros Panagopoulos, Edmundo Reyes, John D. Boniface, Ivan L. Berry, III, Alexander Dulkin +1 more | 2018-12-11 |
| 10062589 | Front opening ring pod | Scott Wong, Damon Tyrone Genetti, Derek John Witkowicki, Alex Paterson, Austin Ngo +1 more | 2018-08-28 |
| 10062590 | Front opening ring pod | Scott Wong, Damon Tyrone Genetti, Derek John Witkowicki, Alex Paterson, Austin Ngo +1 more | 2018-08-28 |
| 10014196 | Wafer transport assembly with integrated buffers | John Daugherty, David Trussell, Michael C. Kellogg, Christopher Pena, Klay Kunkel | 2018-07-03 |
| 9929028 | Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs | David Trussell, John Daugherty, Michael C. Kellogg, Christopher Pena, Klay Kunkel | 2018-03-27 |
| 9881826 | Buffer station with single exit-flow direction | Martin Robert Maraschin, Derek John Witkowicki | 2018-01-30 |
| 9881820 | Front opening ring pod | Scott Wong, Damon Tyrone Genetti, Derek John Witkowicki, Alex Paterson, Austin Ngo +1 more | 2018-01-30 |
| 9842756 | Integrated systems for interfacing with substrate container storage systems | Anthony C. Bonora, Michael Krolak | 2017-12-12 |
| 9698036 | Stacked wafer cassette loading system | Silvia Aguilar, Scott Wong, Derek John Witkowicki, Candi Kristoffersen, Brandon Senn | 2017-07-04 |
| 9502275 | Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs | David Trussell, John Daugherty, Michael C. Kellogg, Christopher Pena, Klay Kunkel | 2016-11-22 |
| 8882433 | Integrated systems for interfacing with substrate container storage systems | Anthony C. Bonora, Michael Krolak | 2014-11-11 |