Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10665476 | Substrate processing system, valve assembly, and processing method | Mehran Behdjat, Robert B. Lowrance, Michael R. Rice, Brent Vopat | 2020-05-26 |
| 10515834 | Multi-station tool with wafer transfer microclimate systems | Mohsen Salek, Richard M. Blank, Richard H. Gould | 2019-12-24 |
| 8796589 | Processing system with the dual end-effector handling | Mehran Behdjat, Robert B. Lowrance, Michael R. Rice, Brent Vopat | 2014-08-05 |
| 7833351 | Batch processing platform for ALD and CVD | Aaron P. Webb, Adam Brailove, Joseph Yudovsky, Nir Merry, Andrew J. Constant +3 more | 2010-11-16 |
| 6562189 | Plasma reactor with a tri-magnet plasma confinement apparatus | Hamid Noorbakhsh, James D. Carducci | 2003-05-13 |
| 6422618 | Personal security lock for use with a camper shell of a truck | David Guldner | 2002-07-23 |
| 6320736 | Chuck having pressurized zones of heat transfer gas | Shamouil Shamouilian, Arnold Kholodenko, Siamak Salimian, Hamid Noorbakhsh, Dennis S. Grimard | 2001-11-20 |
| 6015465 | Temperature control system for semiconductor process chamber | Arnold Kholodenko, Ke Ling Lee, Maya Shendon | 2000-01-18 |