| 10665476 |
Substrate processing system, valve assembly, and processing method |
Mehran Behdjat, Robert B. Lowrance, Michael R. Rice, Brent Vopat |
2020-05-26 |
| 10515834 |
Multi-station tool with wafer transfer microclimate systems |
Mohsen Salek, Richard M. Blank, Richard H. Gould |
2019-12-24 |
| 8796589 |
Processing system with the dual end-effector handling |
Mehran Behdjat, Robert B. Lowrance, Michael R. Rice, Brent Vopat |
2014-08-05 |
| 7833351 |
Batch processing platform for ALD and CVD |
Aaron P. Webb, Adam Brailove, Joseph Yudovsky, Nir Merry, Andrew J. Constant +3 more |
2010-11-16 |
| 6562189 |
Plasma reactor with a tri-magnet plasma confinement apparatus |
Hamid Noorbakhsh, James D. Carducci |
2003-05-13 |
| 6422618 |
Personal security lock for use with a camper shell of a truck |
David Guldner |
2002-07-23 |
| 6320736 |
Chuck having pressurized zones of heat transfer gas |
Shamouil Shamouilian, Arnold Kholodenko, Siamak Salimian, Hamid Noorbakhsh, Dennis S. Grimard |
2001-11-20 |
| 6015465 |
Temperature control system for semiconductor process chamber |
Arnold Kholodenko, Ke Ling Lee, Maya Shendon |
2000-01-18 |
