Issued Patents All Time
Showing 25 most recent of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1089130 | Process chamber manifold | Geraldine VASQUEZ, Shreyas Patil Shanthaveeraswamy, Dien-Yeh Wu, Jallepally Ravi, Yu Lei +3 more | 2025-08-19 |
| D1066440 | Process chamber pumping liner | Yang Li, Xi Cen, Kai Wu, Min-Han Lee | 2025-03-11 |
| 11694919 | Vacuum chuck pressure control system | Dongming Iu | 2023-07-04 |
| 11021794 | Graphite susceptor | Preetham Rao, Subramani Iyer, Kartik Shah | 2021-06-01 |
| 10763141 | Non-contact temperature calibration tool for a substrate support and method of using the same | Niraj Merchant, Lara Hawrylchak, Dietrich Gage, Christopher Dao, Binh Minh Nguyen +2 more | 2020-09-01 |
| 10741428 | Semiconductor processing chamber | Aaron Muir Hunter, Niraj Merchant, Douglas R. McAllister, Dongming Iu, Kong CHAN +1 more | 2020-08-11 |
| 10665476 | Substrate processing system, valve assembly, and processing method | Efrain Quiles, Robert B. Lowrance, Michael R. Rice, Brent Vopat | 2020-05-26 |
| 10453718 | Slit valve door with moving mating part | Shinichi Kurita, John M. White, Suhail Anwar, Makoto Inagawa | 2019-10-22 |
| 10373859 | Support ring with masked edge | Norman L. Tam, Aaron Muir Hunter, Joseph M. Ranish, Koji Nakanishi, Toshiyuki Nakagawa | 2019-08-06 |
| 10128144 | Support cylinder for thermal processing chamber | Aaron Muir Hunter, Joseph M. Ranish, Norman L. Tam, Jeffrey Tobin, Jiping Li +1 more | 2018-11-13 |
| 10056286 | Support ring with masked edge | Norman L. Tam, Aaron Muir Hunter, Joseph M. Ranish, Koji Nakanishi, Toshiyuki Nakagawa | 2018-08-21 |
| 10000847 | Graphite susceptor | Preetham Rao, Subramani Iyer, Kartik Shah | 2018-06-19 |
| D807481 | Patterned heater pedestal | Dongming Iu | 2018-01-09 |
| 9842759 | Support ring with masked edge | Norman L. Tam, Aaron Muir Hunter, Joseph M. Ranish, Koji Nakanishi, Toshiyuki Nakagawa | 2017-12-12 |
| D793526 | Showerhead for a semiconductor processing chamber | — | 2017-08-01 |
| 9659809 | Support cylinder for thermal processing chamber | Aaron Muir Hunter, Joseph M. Ranish, Norman L. Tam, Jeffrey Tobin, Jiping Li +1 more | 2017-05-23 |
| 9579750 | Particle control in laser processing systems | Aaron Muir Hunter, Bruce E. Adams | 2017-02-28 |
| 9514969 | Apparatus for reducing the effect of contamination on a rapid thermal process | Aaron Miller, Norman L. Tam, Michael S. Liu | 2016-12-06 |
| 9385004 | Support cylinder for thermal processing chamber | Aaron Muir Hunter, Joseph M. Ranish, Norman L. Tam, Jeffrey Tobin, Jiping Li +1 more | 2016-07-05 |
| 9330955 | Support ring with masked edge | Norman L. Tam, Aaron Muir Hunter, Joseph M. Ranish, Koji Nakanishi, Toshiyuki Nakagawa | 2016-05-03 |
| 9140647 | Test apparatus for reflective cavity characterization | Joseph M. Ranish, Joseph R. Johnson | 2015-09-22 |
| 8915389 | Electron beam welding of large vacuum chamber body having a high emissivity coating | Shinichi Kurita, Makoto Inagawa | 2014-12-23 |
| 8896837 | Test apparatus for reflective cavity characterization | Joseph M. Ranish, Joseph R. Johnson | 2014-11-25 |
| 8888916 | Thermal reactor with improved gas flow distribution | Ming-Kuei Tseng, Norman L. Tam, Yoshitaka Yokota, Agus Sofian Tjandra, Robert Navasca +3 more | 2014-11-18 |
| 8796589 | Processing system with the dual end-effector handling | Efrain Quiles, Robert B. Lowrance, Michael R. Rice, Brent Vopat | 2014-08-05 |