Issued Patents All Time
Showing 25 most recent of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394606 | Impedance control of local areas of a substrate during plasma deposition thereon in a large PECVD chamber | Zheng John Ye, Andrew Lam, Zeqiong Zhao, Jianhua Zhou, Hshiang AN +2 more | 2025-08-19 |
| 12312689 | Large-area high-density plasma processing chamber for flat panel displays | Yui Lun WU, Jozef Kudela, Carl A. Sorensen, Jeevan Prakash SEQUEIRA | 2025-05-27 |
| 12080516 | High density plasma enhanced process chamber | Zheng John Ye, Jianhua Zhou, ShouQian Shao | 2024-09-03 |
| 10903048 | Substrate processing method and apparatus for controlling phase angles of harmonic signals | Yui Lun WU, Jozef Kudela, Carl A. Sorensen | 2021-01-26 |
| 10468221 | Shadow frame with sides having a varied profile for improved deposition uniformity | Gaku Furuta, Soo Young Choi, Yi Cui, Robin L. Tiner, Jinhyun CHO +1 more | 2019-11-05 |
| 10453718 | Slit valve door with moving mating part | Mehran Behdjat, Shinichi Kurita, John M. White, Makoto Inagawa | 2019-10-22 |
| 10312475 | CVD thin film stress control method for display application | Tae Kyung Won, Soo Young Choi, Sanjay Yadav, Carl A. Sorensen, Chien-Teh Kao +1 more | 2019-06-04 |
| 10312058 | Plasma uniformity control by gas diffuser hole design | Soo Young Choi, John M. White, Qunhua Wang, Li Hou, Ki Woon Kim +4 more | 2019-06-04 |
| 10262837 | Plasma uniformity control by gas diffuser hole design | Soo Young Choi, John M. White, Qunhua Wang, Li Hou, Ki Woon Kim +4 more | 2019-04-16 |
| 10043638 | Compact configurable modular radio frequency matching network assembly for plasma processing systems | Jozef Kudela, Ranjit Indrajit Shinde | 2018-08-07 |
| 9922854 | Vertical inline CVD system | Shinichi Kurita, Jozef Kudela, John M. White, Dong-Kil Yim, Hans Georg Wolf +3 more | 2018-03-20 |
| 9827578 | Tightly fitted ceramic insulator on large area electrode | Jozef Kudela, Jonghoon Baek, John M. White, Robin L. Tiner, Gaku Furuta | 2017-11-28 |
| 9818580 | Transmission line RF applicator for plasma chamber | Jozef Kudela, Tsutomu Tanaka, Carl A. Sorensen, John M. White, Ranjit Indrajit Shinde +2 more | 2017-11-14 |
| 9758869 | Anodized showerhead | Soo Young Choi, Gaku Furuta, Beom Soo Park, Robin L. Tiner, John M. White +1 more | 2017-09-12 |
| 9691650 | Substrate transfer robot with chamber and substrate monitoring capability | Shinichi Kurita, Takayuki Matsumoto, Makoto Inagawa | 2017-06-27 |
| 9458538 | Method and apparatus for sealing an opening of a processing chamber | Shinichi Kurita, Takayuki Matsumoto, Robin L. Tiner, John M. White | 2016-10-04 |
| 9425026 | Systems and methods for improved radio frequency matching networks | Carl A. Sorensen, Jozef Kudela | 2016-08-23 |
| 9397380 | Guided wave applicator with non-gaseous dielectric for plasma chamber | Jozef Kudela, Tsutomu Tanaka, Carl A. Sorensen, John M. White | 2016-07-19 |
| 9382621 | Ground return for plasma processes | Soo Young Choi, Robin L. Tiner, Shinichi Kurita, John M. White, Carl A. Sorensen +3 more | 2016-07-05 |
| 9324597 | Vertical inline CVD system | Shinichi Kurita, Jozef Kudela, John M. White, Dong-Kil Yim, Hans Georg Wolf +3 more | 2016-04-26 |
| 9214340 | Apparatus and method of forming an indium gallium zinc oxide layer | Shinichi Kurita, Srikanth V. RACHERLA | 2015-12-15 |
| 9200368 | Plasma uniformity control by gas diffuser hole design | Soo Young Choi, John M. White, Qunhua Wang, Li Hou, Ki Woon Kim +4 more | 2015-12-01 |
| 9187827 | Substrate support with ceramic insulation | Gaku Furuta, John M. White, Shinichi Kurita, Soo Young Choi, Robin L. Tiner | 2015-11-17 |
| 9068262 | Tightly fitted ceramic insulator on large area electrode | Jozef Kudela, Jonghoon Baek, John M. White, Robin L. Tiner, Gaku Furuta | 2015-06-30 |
| 9048518 | Transmission line RF applicator for plasma chamber | Jozef Kudela, Tsutomu Tanaka, Carl A. Sorensen, John M. White, Ranjit Indrajit Shinde +2 more | 2015-06-02 |