Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12432972 | Semiconductor device | Jaehyun Lee, Jonghan Lee, Hyungkoo Kang | 2025-09-30 |
| 12189313 | Cleaning a structure surface in an EUV chamber | Chunguang Xia, John Tom Stewart, IV, Andrew David LaForge, Deniz Van Heijnsbergen, David Robert Evans +2 more | 2025-01-07 |
| 12136536 | Electrostatic chuck with multiple radio frequency meshes to control plasma uniformity | Edward P. Hammond, IV | 2024-11-05 |
| 11908662 | Device and method for tuning plasma distribution using phase control | Xiaopu Li, Kallol Bera, Edward P. Hammond, IV, Amit Kumar BANSAL, Jun Ma +1 more | 2024-02-20 |
| 11347154 | Cleaning a structure surface in an EUV chamber | Chunguang Xia, John Tom Stewart, IV, Andrew David LaForge, Deniz Van Heijnsbergen, David Robert Evans +2 more | 2022-05-31 |
| 11339475 | Film stack overlay improvement | Xinhai Han, Deenesh Padhi, Daemian Raj Benjamin Raj, Kristopher Enslow, Wenjiao Wang +8 more | 2022-05-24 |
| 11264482 | Semiconductor device including dummy gate patterns and manufacturing method thereof | Donghyun Kim, Inhyun Song, Yeongmin JEON, Sejin Park, Juyun Park +2 more | 2022-03-01 |
| 11013096 | System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector | Mathew Abraham, David Robert Evans, Jack Michael Gazza | 2021-05-18 |
| 10504697 | Particle generation suppresor by DC bias modulation | Soonam Park, Xinglong Chen, Dmitry Lubomirsky | 2019-12-10 |
| 10477662 | System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector | Mathew Abraham, David Robert Evans, Jack Michael Gazza | 2019-11-12 |
| 10362664 | System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector | Mathew Abraham, David Robert Evans, Jack Michael Gazza | 2019-07-23 |
| 10032606 | Semiconductor processing with DC assisted RF power for improved control | Jang-Gyoo Yang, Xinglong Chen, Soonam Park, Saurabh Garg, Shankar Venkataraman | 2018-07-24 |
| 9892888 | Particle generation suppresor by DC bias modulation | Soonam Park, Xinglong Chen, Dmitry Lubomirsky | 2018-02-13 |
| 9888554 | System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector | Mathew Abraham, David Robert Evans, Jack Michael Gazza | 2018-02-06 |
| 9850576 | Anti-arc zero field plate | Edwin C. Suarez, Tsutomu Tanaka, Edward P. Hammond, IV, Jeonghoon Oh | 2017-12-26 |
| 9827578 | Tightly fitted ceramic insulator on large area electrode | Jozef Kudela, John M. White, Robin L. Tiner, Suhail Anwar, Gaku Furuta | 2017-11-28 |
| 9593421 | Particle generation suppressor by DC bias modulation | Soonam Park, Xinglong Chen, Dmitry Lubomirsky | 2017-03-14 |
| 9384997 | Dry-etch selectivity | He Ren, Jang-Gyoo Yang, Anchuan Wang, Soonam Park, Saurabh Garg +2 more | 2016-07-05 |
| 9373517 | Semiconductor processing with DC assisted RF power for improved control | Jang-Gyoo Yang, Xinglong Chen, Soonam Park, Saurabh Garg, Shankar Venkataraman | 2016-06-21 |
| 9068262 | Tightly fitted ceramic insulator on large area electrode | Jozef Kudela, John M. White, Robin L. Tiner, Suhail Anwar, Gaku Furuta | 2015-06-30 |
| 9039864 | Off-center ground return for RF-powered showerhead | Beom Soo Park, Sam Kim | 2015-05-26 |
| 8969212 | Dry-etch selectivity | He Ren, Jang-Gyoo Yang, Anchuan Wang, Soonam Park, Saurabh Garg +2 more | 2015-03-03 |
| 8875657 | Balancing RF bridge assembly | Sam Kim, Beom Soo Park | 2014-11-04 |
| 8312839 | Mixing frequency at multiple feeding points | — | 2012-11-20 |