| 12452598 |
Display device |
Seung Lyong BOK, Yong Man Seo, Sun Yu, Jong-Hoon Lee, Jin Oh Kwag |
2025-10-21 |
|
| 12432972 |
Semiconductor device |
Jaehyun Lee, Jonghan Lee, Hyungkoo Kang |
2025-09-30 |
|
| 12189313 |
Cleaning a structure surface in an EUV chamber |
Chunguang Xia, John Tom Stewart, IV, Andrew David LaForge, Deniz Van Heijnsbergen, David Robert Evans +2 more |
2025-01-07 |
|
| 12136536 |
Electrostatic chuck with multiple radio frequency meshes to control plasma uniformity |
Edward P. Hammond, IV |
2024-11-05 |
$79,202,000 |
| 11908662 |
Device and method for tuning plasma distribution using phase control |
Xiaopu Li, Kallol Bera, Edward P. Hammond, IV, Amit Kumar BANSAL, Jun Ma +1 more |
2024-02-20 |
$66,055,000 |
| 11347154 |
Cleaning a structure surface in an EUV chamber |
Chunguang Xia, John Tom Stewart, IV, Andrew David LaForge, Deniz Van Heijnsbergen, David Robert Evans +2 more |
2022-05-31 |
$47,965,000 |
| 11339475 |
Film stack overlay improvement |
Xinhai Han, Deenesh Padhi, Daemian Raj Benjamin Raj, Kristopher Enslow, Wenjiao Wang +8 more |
2022-05-24 |
$75,273,000 |
| 11264482 |
Semiconductor device including dummy gate patterns and manufacturing method thereof |
Donghyun Kim, Inhyun Song, Yeongmin JEON, Sejin Park, Juyun Park +2 more |
2022-03-01 |
|
| 11013096 |
System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector |
Mathew Abraham, David Robert Evans, Jack Michael Gazza |
2021-05-18 |
|
| 10504697 |
Particle generation suppresor by DC bias modulation |
Soonam Park, Xinglong Chen, Dmitry Lubomirsky |
2019-12-10 |
$14,920,000 |
| 10477662 |
System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector |
Mathew Abraham, David Robert Evans, Jack Michael Gazza |
2019-11-12 |
|
| 10362664 |
System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector |
Mathew Abraham, David Robert Evans, Jack Michael Gazza |
2019-07-23 |
$17,083,000 |
| 10032606 |
Semiconductor processing with DC assisted RF power for improved control |
Jang-Gyoo Yang, Xinglong Chen, Soonam Park, Saurabh Garg, Shankar Venkataraman |
2018-07-24 |
$37,876,000 |
| 9892888 |
Particle generation suppresor by DC bias modulation |
Soonam Park, Xinglong Chen, Dmitry Lubomirsky |
2018-02-13 |
$51,254,000 |
| 9888554 |
System, method and apparatus for target material debris cleaning of EUV vessel and EUV collector |
Mathew Abraham, David Robert Evans, Jack Michael Gazza |
2018-02-06 |
$21,359,000 |
| 9850576 |
Anti-arc zero field plate |
Edwin C. Suarez, Tsutomu Tanaka, Edward P. Hammond, IV, Jeonghoon Oh |
2017-12-26 |
$19,032,000 |
| 9827578 |
Tightly fitted ceramic insulator on large area electrode |
Jozef Kudela, John M. White, Robin L. Tiner, Suhail Anwar, Gaku Furuta |
2017-11-28 |
$20,834,000 |
| 9593421 |
Particle generation suppressor by DC bias modulation |
Soonam Park, Xinglong Chen, Dmitry Lubomirsky |
2017-03-14 |
$16,778,000 |
| 9384997 |
Dry-etch selectivity |
He Ren, Jang-Gyoo Yang, Anchuan Wang, Soonam Park, Saurabh Garg +2 more |
2016-07-05 |
$10,411,000 |
| 9373517 |
Semiconductor processing with DC assisted RF power for improved control |
Jang-Gyoo Yang, Xinglong Chen, Soonam Park, Saurabh Garg, Shankar Venkataraman |
2016-06-21 |
$17,194,000 |
| 9068262 |
Tightly fitted ceramic insulator on large area electrode |
Jozef Kudela, John M. White, Robin L. Tiner, Suhail Anwar, Gaku Furuta |
2015-06-30 |
$11,421,000 |
| 9039864 |
Off-center ground return for RF-powered showerhead |
Beom Soo Park, Sam Kim |
2015-05-26 |
$17,022,000 |
| 8969212 |
Dry-etch selectivity |
He Ren, Jang-Gyoo Yang, Anchuan Wang, Soonam Park, Saurabh Garg +2 more |
2015-03-03 |
$11,301,000 |
| 8875657 |
Balancing RF bridge assembly |
Sam Kim, Beom Soo Park |
2014-11-04 |
$12,728,000 |
| 8312839 |
Mixing frequency at multiple feeding points |
— |
2012-11-20 |
$4,897,000 |
