| 12497943 |
Brake mechanism for a radial piston unit |
Chris Shrive, Yaowen Wan |
2025-12-16 |
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| 12246931 |
Wafer transfer device and wafer transfer method |
Tianyao Wu, Hao Wang, Tao Miao |
2025-03-11 |
|
| 12146219 |
Flow control features of CVD chambers |
Kien N. Chuc, Qiwei Liang, Hanh Nguyen, Matthew L. Miller, Soonam Park +5 more |
2024-11-19 |
$80,955,000 |
| 12100606 |
Wafer transfer device and wafer transfer method |
Tianyao Wu, Hao Wang, Tao Miao |
2024-09-24 |
|
| 12098783 |
Gas flow control valve and mounting method for gas flow control valve |
Jianguo Xu, Jiazhong Wu, Haishui Han, Na Zhang |
2024-09-24 |
|
| 12038344 |
Phase power device and fluid experiment system |
Qingjie Liu, Jiazhong Wu, Haishui Han, Hongwei Yu |
2024-07-16 |
|
| 11898268 |
Calcium metaborate birefringent crystal, preparation method and use thereof |
Shilie Pan, Fangfang Zhang |
2024-02-13 |
|
| 11428065 |
Borehole wall resistance increasing apparatus for improving energy utilization rate of injection gas |
Qingxin Song, Zhidong Yang, Shanyan Zhang, Zemin Ji, Yulong Pu |
2022-08-30 |
$3,534,000 |
| 11377941 |
Gasflow distribution device, gas distributor, pipe string and method for separate-layer gas injection |
Jingyao Wang, Chengming Zhang, Shitou Wang, Jiazhong Wu, Zhong Ren |
2022-07-05 |
$3,228,000 |
| 11344824 |
Ultrasonic microbubble generation method, apparatus and system |
Hongwei Yu, Shi-Lin Li, Haishui Han, Zemin Ji |
2022-05-31 |
$3,829,000 |
| 11264213 |
Chemical control features in wafer process equipment |
Qiwei Liang, Kien N. Chuc, Dmitry Lubomirsky, Soonam Park, Jang-Gyoo Yang +4 more |
2022-03-01 |
$41,046,000 |
| 11179683 |
Microbubble generation device and equipment |
Jiazhong Wu, Haishui Han, Shi-Lin Li, Hongwei Yu, Zemin Ji |
2021-11-23 |
$1,488,000 |
| 11098569 |
System and method of performing oil displacement by water-gas dispersion system |
Jiazhong Wu, Hongwei Yu, Shi-Lin Li, Haishui Han |
2021-08-24 |
$1,194,000 |
| 11024486 |
Semiconductor processing systems having multiple plasma configurations |
Dmitry Lubomirsky, Shankar Venkataraman |
2021-06-01 |
$74,932,000 |
| 10604863 |
Lithium metaborate crystal, preparation method and use thereof |
Shilie Pan, Fangfang Zhang, Xueling Hou |
2020-03-31 |
|
| 10550472 |
Flow control features of CVD chambers |
Kien N. Chuc, Qiwei Liang, Hanh Nguyen, Matthew L. Miller, Soonam Park +5 more |
2020-02-04 |
$27,329,000 |
| 10529618 |
Methods of manufacturing a semiconductor device |
Siqing Lu, Sang-Hoon Ahn, Ki Hyun Kim, Kyu In Shim |
2020-01-07 |
|
| 10504697 |
Particle generation suppresor by DC bias modulation |
Jonghoon Baek, Soonam Park, Dmitry Lubomirsky |
2019-12-10 |
$14,920,000 |
| 10424485 |
Enhanced etching processes using remote plasma sources |
Nitin K. Ingle, Dmitry Lubomirsky, Shankar Venkataraman |
2019-09-24 |
$43,471,000 |
| 10354843 |
Chemical control features in wafer process equipment |
Qiwei Liang, Kien N. Chuc, Dmitry Lubomirsky, Soonam Park, Jang-Gyoo Yang +4 more |
2019-07-16 |
$26,330,000 |
| 10283321 |
Semiconductor processing system and methods using capacitively coupled plasma |
Jang-Gyoo Yang, Matthew L. Miller, Kien N. Chuc, Qiwei Liang, Shankar Venkataraman +1 more |
2019-05-07 |
$13,988,000 |
| 10256079 |
Semiconductor processing systems having multiple plasma configurations |
Dmitry Lubomirsky, Shankar Venkataraman |
2019-04-09 |
$19,096,000 |
| 10170282 |
Insulated semiconductor faceplate designs |
Dmitry Lubomirsky, Shankar Venkataraman |
2019-01-01 |
|
| 10062587 |
Pedestal with multi-zone temperature control and multiple purge capabilities |
Jang-Gyoo Yang, Alexander Tam, Elisha Tam |
2018-08-28 |
$23,630,000 |
| 10056233 |
RPS assisted RF plasma source for semiconductor processing |
Saurabh Garg, Jang-Gyoo Yang |
2018-08-21 |
$27,925,000 |
