Issued Patents All Time
Showing 25 most recent of 73 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12288672 | Methods and apparatus for carbon compound film deposition | Srinivas D. Nemani, Chentsau Chris Ying, Ellie Yieh, Erica Chen, Nithin Thomas ALEX | 2025-04-29 |
| 12203171 | Batch curing chamber with gas distribution and individual pumping | Adib Khan, Shankar Venkataraman, Jay D. Pinson, II, Jang-Gyoo Yang, Nitin K. Ingle | 2025-01-21 |
| 12198951 | High pressure wafer processing systems and related methods | Srinivas D. Nemani, Adib Khan, Venkata Ravishankar Kasibhotla, Sultan Malik, Sean S. Kang +1 more | 2025-01-14 |
| 12181801 | Chamber and methods of treating a substrate after exposure to radiation | Dmitry Lubomirsky, Douglas A. Buchberger, Jr., Hyunjun Kim, Ellie Yieh | 2024-12-31 |
| 12146219 | Flow control features of CVD chambers | Kien N. Chuc, Hanh Nguyen, Xinglong Chen, Matthew L. Miller, Soonam Park +5 more | 2024-11-19 |
| 12142467 | Self-assembled monolayer deposition from low vapor pressure organic molecules | Srinivas D. Nemani, Keith Tatseun Wong, Antony K. Jan | 2024-11-12 |
| 12112972 | Rotating biasable pedestal and electrostatic chuck in semiconductor process chamber | Douglas A. Buchberger, Jr., Gautam Pisharody, Dmitry Lubomirsky, Shekhar ATHANI | 2024-10-08 |
| 11976973 | Blending of agricultural products via hyperspectral imaging and analysis | Seetharama C. Deevi, Henry M. Dante, Samuel Timothy Henry | 2024-05-07 |
| 11948828 | Pin-less substrate transfer apparatus and method for a processing chamber | Sultan Malik, Srinivas D. Nemani, Adib Khan | 2024-04-02 |
| 11899366 | Method and apparatus for post exposure processing of photoresist wafers | Viachslav Babayan, Douglas A. Buchberger, Jr., Ludovic Godet, Srinivas D. Nemani, Daniel J. Woodruff +2 more | 2024-02-13 |
| 11756803 | Gas delivery system for high pressure processing chamber | Srinivas D. Nemani, Sean S. Kang, Adib Khan, Ellie Yieh | 2023-09-12 |
| 11749555 | Semiconductor processing system | Sultan Malik, Srinivas D. Nemani, Adib Khan | 2023-09-05 |
| 11725274 | Integrated cluster tool for selective area deposition | Tobin Kaufman-Osborn, Srinivas D. Nemani, Ludovic Godet, Adib Khan | 2023-08-15 |
| 11682556 | Methods of improving graphene deposition for processes using microwave surface-wave plasma on dielectric materials | Jie Zhou, Erica Chen, Chentsau Chris Ying, Srinivas D. Nemani, Ellie Yieh | 2023-06-20 |
| 11527421 | Gas delivery system for high pressure processing chamber | Srinivas D. Nemani, Sean S. Kang, Adib Khan, Ellie Yieh | 2022-12-13 |
| 11408075 | Batch curing chamber with gas distribution and individual pumping | Adib Khan, Shankar Venkataraman, Jay D. Pinson, II, Jang-Gyoo Yang, Nitin K. Ingle | 2022-08-09 |
| 11387071 | Multi-source ion beam etch system | Srinivas D. Nemani, Ellie Yieh, Douglas A. Buchberger, Jr., Chentsau Chris Ying | 2022-07-12 |
| 11361978 | Gas delivery module | Adib Khan, Sultan Malik, Srinivas D. Nemani | 2022-06-14 |
| 11289331 | Methods for graphene formation using microwave surface-wave plasma on dielectric materials | Jie Zhou, Erica Chen, Chentsau Chris Ying, Srinivas D. Nemani, Ellie Yieh | 2022-03-29 |
| 11264213 | Chemical control features in wafer process equipment | Xinglong Chen, Kien N. Chuc, Dmitry Lubomirsky, Soonam Park, Jang-Gyoo Yang +4 more | 2022-03-01 |
| 11250259 | Blending of agricultural products via hyperspectral imaging and analysis | Seetharama C. Deevi, Henry M. Dante, Samuel Timothy Henry | 2022-02-15 |
| 11244808 | Monopole antenna array source for semiconductor process equipment | Srinivas D. Nemani | 2022-02-08 |
| D941787 | Substrate transfer blade | Sultan Malik, Srinivas D. Nemani, Adib Khan | 2022-01-25 |
| 11222771 | Chemical control features in wafer process equipment | Rohit Sharma, Jingyu Qiao | 2022-01-11 |
| 11222769 | Monopole antenna array source with gas supply or grid filter for semiconductor process equipment | Srinivas D. Nemani | 2022-01-11 |