Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198951 | High pressure wafer processing systems and related methods | Qiwei Liang, Srinivas D. Nemani, Adib Khan, Venkata Ravishankar Kasibhotla, Sean S. Kang +1 more | 2025-01-14 |
| 11948828 | Pin-less substrate transfer apparatus and method for a processing chamber | Srinivas D. Nemani, Adib Khan, Qiwei Liang | 2024-04-02 |
| 11749555 | Semiconductor processing system | Srinivas D. Nemani, Qiwei Liang, Adib Khan | 2023-09-05 |
| 11361978 | Gas delivery module | Adib Khan, Qiwei Liang, Srinivas D. Nemani | 2022-06-14 |
| D941787 | Substrate transfer blade | Srinivas D. Nemani, Adib Khan, Qiwei Liang | 2022-01-25 |
| 11110383 | Gas abatement apparatus | Adib Khan, Qiwei Liang, Srinivas D. Nemani, Rafika Smati, Joseph Ng +1 more | 2021-09-07 |
| 10748783 | Gas delivery module | Adib Khan, Qiwei Liang, Srinivas D. Nemani | 2020-08-18 |
| 10704141 | In-situ CVD and ALD coating of chamber to control metal contamination | Srinivas D. Nemani, Qiwei Liang, Adib Khan, Maximillian Clemons | 2020-07-07 |
| 10675581 | Gas abatement apparatus | Adib Khan, Qiwei Liang, Srinivas D. Nemani, Rafika Smati, Joseph Ng +1 more | 2020-06-09 |
| 10529603 | High pressure wafer processing systems and related methods | Qiwei Liang, Srinivas D. Nemani, Adib Khan, Venkata Ravishankar Kasibhotla, Sean S. Kang +1 more | 2020-01-07 |
| 10468285 | High temperature chuck for plasma processing systems | Toan Q. Tran, Dmitry Lubomirsky, Shambhu N. Roy, Satoru Kobayashi, Tae Seung Cho +2 more | 2019-11-05 |
| 10224224 | High pressure wafer processing systems and related methods | Qiwei Liang, Srinivas D. Nemani, Adib Khan, Venkata Ravishankar Kasibhotla, Sean S. Kang +1 more | 2019-03-05 |
| 10179941 | Gas delivery system for high pressure processing chamber | Adib Khan, Qiwei Liang, Keith Tatseun Wong, Srinivas D. Nemani | 2019-01-15 |
| 9728437 | High temperature chuck for plasma processing systems | Toan Q. Tran, Dmitry Lubomirsky, Shambhu N. Roy, Satoru Kobayashi, Tae Seung Cho +2 more | 2017-08-08 |