Issued Patents All Time
Showing 25 most recent of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431339 | Adjustable de-chucking voltage | Andrew Nguyen, Lu Liu, Daniel Nguyen | 2025-09-30 |
| 12288675 | Cylindrical cavity with impedance shifting by irises in a power-supplying waveguide | Satoru Kobayashi, Hideo Sugai, Soonam Park, Dmitry Lubomirsky | 2025-04-29 |
| 12178202 | Insect monitoring system and method | My T. Nguyen, Cuong Q. Hong, Phuong H. Son, Luom H. Pham, Quy M. Phan +1 more | 2024-12-31 |
| 12146219 | Flow control features of CVD chambers | Kien N. Chuc, Qiwei Liang, Hanh Nguyen, Xinglong Chen, Matthew L. Miller +5 more | 2024-11-19 |
| 12009228 | Low temperature chuck for plasma processing systems | Zilu Weng, Dmitry Lubomirsky, Satoru Kobayashi, Tae Seung Cho, Soonam Park +2 more | 2024-06-11 |
| 11972930 | Cylindrical cavity with impedance shifting by irises in a power-supplying waveguide | Satoru Kobayashi, Hideo Sugai, Soonam Park, Dmitry Lubomirsky | 2024-04-30 |
| 11728139 | Process chamber for cyclic and selective material removal and etching | Soonam Park, Junghoon Kim, Dmitry Lubomirsky | 2023-08-15 |
| 11700801 | Alternate wetting and drying (AWD) system and method | My T. Nguyen, Cuong Q. Hong, Luong V. Truong, Trieu T. Le, Bien T. Mai +3 more | 2023-07-18 |
| 11594428 | Low temperature chuck for plasma processing systems | Zilu Weng, Dmitry Lubomirsky, Satoru Kobayashi, Tae Seung Cho, Soonam Park +2 more | 2023-02-28 |
| 11476093 | Plasma etching systems and methods with secondary plasma injection | Soonam Park, Zilu Weng, Dmitry Lubomirsky | 2022-10-18 |
| 11369067 | Irrigation system and method | My T. Nguyen, Cuong Q. Hong, Luong V. Truong, Trieu T. Le, Bien T. Mai +3 more | 2022-06-28 |
| 11361941 | Methods and apparatus for processing a substrate | Junghoon Kim, Tae Seung Cho, Dmitry Lubomirsky | 2022-06-14 |
| 11264213 | Chemical control features in wafer process equipment | Qiwei Liang, Xinglong Chen, Kien N. Chuc, Dmitry Lubomirsky, Soonam Park +4 more | 2022-03-01 |
| 11195699 | Generalized cylindrical cavity system for microwave rotation and impedance shifting by irises in a power-supplying waveguide | Satoru Kobayashi, Hideo Sugai, Soonam Park, Dmitry Lubomirsky | 2021-12-07 |
| 11004661 | Process chamber for cyclic and selective material removal and etching | Soonam Park, Junghoon Kim, Dmitry Lubomirsky | 2021-05-11 |
| 10903052 | Systems and methods for radial and azimuthal control of plasma uniformity | Satoru Kobayashi, Hideo Sugai, Nikolai Kalnin, Soonam Park, Dmitry Lubomirsky | 2021-01-26 |
| 10755900 | Multi-layer plasma erosion protection for chamber components | Laksheswar Kalita, Tae Won Kim, Dmitry Lubomirsky, Xiaowei Wu, Xiao-Ming He +2 more | 2020-08-25 |
| 10559451 | Apparatus with concentric pumping for multiple pressure regimes | Nikolai Kalnin, Dmitry Lubomirsky | 2020-02-11 |
| 10550472 | Flow control features of CVD chambers | Kien N. Chuc, Qiwei Liang, Hanh Nguyen, Xinglong Chen, Matthew L. Miller +5 more | 2020-02-04 |
| 10504700 | Plasma etching systems and methods with secondary plasma injection | Soonam Park, Zilu Weng, Dmitry Lubomirsky | 2019-12-10 |
| 10468285 | High temperature chuck for plasma processing systems | Sultan Malik, Dmitry Lubomirsky, Shambhu N. Roy, Satoru Kobayashi, Tae Seung Cho +2 more | 2019-11-05 |
| 10431429 | Systems and methods for radial and azimuthal control of plasma uniformity | Satoru Kobayashi, Hideo Sugai, Nikolai Kalnin, Soonam Park, Dmitry Lubomirsky | 2019-10-01 |
| 10354843 | Chemical control features in wafer process equipment | Qiwei Liang, Xinglong Chen, Kien N. Chuc, Dmitry Lubomirsky, Soonam Park +4 more | 2019-07-16 |
| 10340124 | Generalized cylindrical cavity system for microwave rotation and impedance shifting by irises in a power-supplying waveguide | Satoru Kobayashi, Hideo Sugai, Soonam Park, Dmitry Lubomirsky | 2019-07-02 |
| 9978564 | Chemical control features in wafer process equipment | Qiwei Liang, Xinglong Chen, Kien N. Chuc, Dmitry Lubomirsky, Soonam Park +4 more | 2018-05-22 |