Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12009228 | Low temperature chuck for plasma processing systems | Toan Q. Tran, Dmitry Lubomirsky, Satoru Kobayashi, Tae Seung Cho, Soonam Park +2 more | 2024-06-11 |
| 11594428 | Low temperature chuck for plasma processing systems | Toan Q. Tran, Dmitry Lubomirsky, Satoru Kobayashi, Tae Seung Cho, Soonam Park +2 more | 2023-02-28 |
| 11476093 | Plasma etching systems and methods with secondary plasma injection | Toan Q. Tran, Soonam Park, Dmitry Lubomirsky | 2022-10-18 |
| 10504700 | Plasma etching systems and methods with secondary plasma injection | Toan Q. Tran, Soonam Park, Dmitry Lubomirsky | 2019-12-10 |