Issued Patents All Time
Showing 25 most recent of 222 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406833 | Ion extraction optics having non uniform grid assembly | Costel Biloiu, Alan V. Hayes, Christopher Campbell | 2025-09-02 |
| 12372874 | System architecture of manufacturing of semiconductor wafers | Huixiong Dai, Ellie Yieh | 2025-07-29 |
| 12340979 | Semiconductor processing chamber for improved precursor flow | Tien Fak Tan, Soonwook Jung, Soonam Park, Raymond W. Lu, Phong Pham +1 more | 2025-06-24 |
| 12288675 | Cylindrical cavity with impedance shifting by irises in a power-supplying waveguide | Satoru Kobayashi, Hideo Sugai, Toan Q. Tran, Soonam Park | 2025-04-29 |
| 12204246 | Metal oxide resist patterning with electrical field guided post-exposure bake | Huixiong Dai, Mangesh Ashok BANGAR, Srinivas D. Nemani, Steven Hiloong WELCH, Ellie Yieh | 2025-01-21 |
| 12181801 | Chamber and methods of treating a substrate after exposure to radiation | Douglas A. Buchberger, Jr., Qiwei Liang, Hyunjun Kim, Ellie Yieh | 2024-12-31 |
| 12146219 | Flow control features of CVD chambers | Kien N. Chuc, Qiwei Liang, Hanh Nguyen, Xinglong Chen, Matthew L. Miller +5 more | 2024-11-19 |
| 12125680 | Ion extraction assembly having variable electrode thickness for beam uniformity control | Alexandre Likhanskii, Alan V. Hayes | 2024-10-22 |
| 12112972 | Rotating biasable pedestal and electrostatic chuck in semiconductor process chamber | Qiwei Liang, Douglas A. Buchberger, Jr., Gautam Pisharody, Shekhar ATHANI | 2024-10-08 |
| 12009228 | Low temperature chuck for plasma processing systems | Toan Q. Tran, Zilu Weng, Satoru Kobayashi, Tae Seung Cho, Soonam Park +2 more | 2024-06-11 |
| 11972930 | Cylindrical cavity with impedance shifting by irises in a power-supplying waveguide | Satoru Kobayashi, Hideo Sugai, Toan Q. Tran, Soonam Park | 2024-04-30 |
| 11934103 | Apparatus for post exposure bake of photoresist | Douglas A. Buchberger, Jr., John O. Dukovic, Srinivas D. Nemani | 2024-03-19 |
| 11915950 | Multi-zone semiconductor substrate supports | Mehmet Tugrul Samir, Dongqing Yang, Peter M. Hillman, Soonam Park, Martin Yue Choy +1 more | 2024-02-27 |
| 11915911 | Two piece electrode assembly with gap for plasma control | Tien Fak Tan, Saravjeet Singh, Tae Wan Kim, Kenneth D. Schatz, Tae Seung Cho +1 more | 2024-02-27 |
| 11901161 | Methods and apparatus for symmetrical hollow cathode electrode and discharge mode for remote plasma processes | Tae Seung Cho, Saravana Kumar Natarajan, Kenneth D. Schatz, Samartha Subramanya | 2024-02-13 |
| 11834744 | Ceramic showerheads with conductive electrodes | Laksheswar Kalita, Soonam Park, Tien Fak Tan, LokKee Loh, Saravjeet Singh +1 more | 2023-12-05 |
| 11815816 | Apparatus for post exposure bake of photoresist | Douglas A. Buchberger, Jr., John O. Dukovic, Srinivas D. Nemani | 2023-11-14 |
| 11735441 | Systems and methods for improved semiconductor etching and component protection | Tien Fak Tan, Lok Kee Loh, Soonwook Jung, Martin Yue Choy, Soonam Park | 2023-08-22 |
| 11728139 | Process chamber for cyclic and selective material removal and etching | Toan Q. Tran, Soonam Park, Junghoon Kim | 2023-08-15 |
| 11715625 | Semiconductor processing chamber | Greg Toland, Kenneth D. Schatz, Laksheswar Kalita | 2023-08-01 |
| 11637002 | Methods and systems to enhance process uniformity | Saravjeet Singh, Alan Tso, Jingchun Zhang, Zihui Li, Hanshen Zhang | 2023-04-25 |
| 11609505 | Apparatus and methods for verification and re-use of process fluids | Mangesh Ashok BANGAR, Gautam Pisharody, Lancelot HUANG, Alan Tso, Douglas A. Buchberger, Jr. +3 more | 2023-03-21 |
| 11594428 | Low temperature chuck for plasma processing systems | Toan Q. Tran, Zilu Weng, Satoru Kobayashi, Tae Seung Cho, Soonam Park +2 more | 2023-02-28 |
| 11591693 | Ceramic showerheads with conductive electrodes | Laksheswar Kalita, Soonam Park, Tien Fak Tan, LokKee Loh, Saravjeet Singh +1 more | 2023-02-28 |
| 11587771 | Chemistry compatible coating material for advanced device on-wafer particle performance | Jennifer Y. Sun, Biraja P. Kanungo | 2023-02-21 |