Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322633 | Electrostatic chuck with improved temperature control | Hanish Kumar Panavalappil Kumarankutty, Sean M. Seutter, Sudhir Gondhalekar, Wendell Glenn Boyd, Jr., Badri Narayan Ramamurthi +2 more | 2025-06-03 |
| 12112972 | Rotating biasable pedestal and electrostatic chuck in semiconductor process chamber | Qiwei Liang, Douglas A. Buchberger, Jr., Gautam Pisharody, Dmitry Lubomirsky | 2024-10-08 |
| 10388549 | On-board metrology (OBM) design and implication in process tool | Khokan Chandra Paul, Jay D. Pinson, II, Juan Carlos Rocha-Alvarez, Hari Ponnekanti, Rupankar Choudhury +2 more | 2019-08-20 |