Issued Patents All Time
Showing 1–25 of 151 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12266550 | Multiple process semiconductor processing system | Nitin Pathak, Vinay Prabhakar, Badri Narayan Ramamurthi, Viren Kalsekar | 2025-04-01 |
| 12217937 | Radio frequency source for inductively coupled and capacitively coupled plasmas in substrate processing chambers | Abdul Aziz Khaja | 2025-02-04 |
| 12205845 | Semiconductor processing chamber to accommodate parasitic plasma formation | Khokan Chandra Paul, Tsutomu Tanaka, Adam J. Fischbach, Abhijit A. Kangude | 2025-01-21 |
| 12131934 | Semiconductor substrate support leveling apparatus | Katherine Woo, Paul Brillhart, Jian Li, Shinnosuke Kawaguchi, David W. Groechel +4 more | 2024-10-29 |
| 12110590 | Faceplate having a curved surface | Shailendra Srivastava, Sai Susmita Addepalli, Nikhil Sudhindrarao Jorapur, Daemian Raj Benjamin Raj, Amit Kumar BANSAL +5 more | 2024-10-08 |
| 12094748 | Bipolar esc with balanced RF impedance | Jian Li, Edward P. Hammond, IV, Dmitry A. Dzilno, Wenhao Zhang | 2024-09-17 |
| 12080584 | Real time bias detection and correction for electrostatic chuck | Jian Li, Dmitry A. Dzilno | 2024-09-03 |
| 12060637 | Actively cooled foreline trap to reduce throttle valve drift | Gaosheng Fu, Tuan Nguyen, Amit Kumar BANSAL, Karthik Janakiraman | 2024-08-13 |
| 12057339 | Bipolar electrostatic chuck to limit DC discharge | Jian Li, Dmitry A. Dzilno, Zheng John Ye, Paul Brillhart | 2024-08-06 |
| 12040210 | Multi-pressure bipolar electrostatic chucking | Jian Li, Dmitry A. Dzilno, Paul Brillhart, Akshay Gunaji, Mayur Govind Kulkarni +6 more | 2024-07-16 |
| 11952663 | Hardware to prevent bottom purge incursion in application volume and process gas diffusion below heater | Nitin Pathak, Tuan Nguyen, Amit Kumar BANSAL, Badri Narayan Ramamurthi, Thomas Rubio | 2024-04-09 |
| 11952660 | Semiconductor processing chambers and methods for cleaning the same | Nitin Pathak, Yuxing Zhang, Tuan Nguyen, Kalyanjit Ghosh, Amit Kumar BANSAL | 2024-04-09 |
| 11946686 | Thermally stable flow meters for precision fluid delivery | Shailendra Srivastava, Syed A. Alam, Nikhil Sudhindrarao Jorapur, Daemian Raj Benjamin Raj | 2024-04-02 |
| 11898249 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2024-02-13 |
| 11901209 | High temperature bipolar electrostatic chuck | Jian Li, Zheng John Ye, Dmitry A. Dzilno | 2024-02-13 |
| 11851759 | Faceplate having a curved surface | Shailendra Srivastava, Sai Susmita Addepalli, Nikhil Sudhindrarao Jorapur, Daemian Raj Benjamin Raj, Amit Kumar BANSAL +5 more | 2023-12-26 |
| 11827980 | Isolator apparatus and methods for substrate processing chambers | Nitin Pathak, Amit Kumar BANSAL, Tuan Nguyen, Thomas Rubio, Badri Narayan Ramamurthi | 2023-11-28 |
| 11830706 | Heated pedestal design for improved heat transfer and temperature uniformity | Venkata Sharat Chandra Parimi, Zubin Huang, Jian Li, Satish Radhakrishnan, Rui Cheng +7 more | 2023-11-28 |
| 11776835 | Power supply signal conditioning for an electrostatic chuck | Zheng John Ye, Daemian Raj Benjamin Raj, Rana Howlader, Abhigyan Keshri, Sanjay Kamath +6 more | 2023-10-03 |
| 11699602 | Substrate support assemblies and components | Jian Li, Edward P. Hammond, IV, Viren Kalsekar, Vidyadharan Srinivasa Murthy Bangalore | 2023-07-11 |
| 11643725 | Hardware to prevent bottom purge incursion in application volume and process gas diffusion below heater | Nitin Pathak, Tuan Nguyen, Amit Kumar BANSAL, Badri Narayan Ramamurthi, Thomas Rubio | 2023-05-09 |
| 11613812 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2023-03-28 |
| 11594440 | Real time bias detection and correction for electrostatic chuck | Jian Li, Dmitry A. Dzilno | 2023-02-28 |
| 11587817 | High temperature bipolar electrostatic chuck | Jian Li, Zheng John Ye, Dmitry A. Dzilno | 2023-02-21 |
| 11574825 | External substrate system rotation in a semiconductor processing system | Tuan Nguyen, Amit Kumar BANSAL | 2023-02-07 |