Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12062567 | Systems and methods for substrate support temperature control | Zubin Huang, Rui Cheng, Diwakar Kedlaya, Anton Baryshnikov, Venkatanarayana Shankaramurthy +3 more | 2024-08-13 |
| 12043895 | Methods of using a segmented showerhead for uniform delivery of multiple pre-cursors | Alexander Lerner, Prashanth Kothnur, Roey Shaviv | 2024-07-23 |
| 11970775 | Showerhead for providing multiple materials to a process chamber | Prashanth Kothnur, Alexander Lerner, Sergei Klimovich, Roey Shaviv | 2024-04-30 |
| 11835927 | Reducing substrate surface scratching using machine learning | Kartik Shah, Karthik Ramanathan, Karthikeyan Balaraman, Adolph Miller Allen, Xinyuan Chong +5 more | 2023-12-05 |
| 11834743 | Segmented showerhead for uniform delivery of multiple precursors | Alexander Lerner, Prashanth Kothnur, Roey Shaviv | 2023-12-05 |
| 11830706 | Heated pedestal design for improved heat transfer and temperature uniformity | Venkata Sharat Chandra Parimi, Zubin Huang, Jian Li, Rui Cheng, Diwakar Kedlaya +7 more | 2023-11-28 |
| 11692261 | Evaporator chamber for forming films on substrates | Alexander Lerner, Roey Shaviv | 2023-07-04 |
| 11682544 | Cover wafer for semiconductor processing chamber | Venkata Sharat Chandra Parimi, Diwakar Kedlaya, Fang Ruan, Amit Kumar BANSAL | 2023-06-20 |
| 11600470 | Targeted heat control systems | Venkata Sharat Chandra Parimi, Xiaoquan Min, Sarah Michelle Bobek, Sungwon Ha, Prashant Kumar Kulshreshtha +1 more | 2023-03-07 |
| 11586160 | Reducing substrate surface scratching using machine learning | Kartik Shah, Karthik Ramanathan, Karthikeyan Balaraman, Adolph Miller Allen, Xinyuan Chong +5 more | 2023-02-21 |
| 11515176 | Thermally controlled lid stack components | Siva Chandrasekar, Rajath Kumar Lakkenahalli Hiriyannaiah, Viren Kalsekar, Vinay Prabhakar | 2022-11-29 |
| 11515129 | Radiation shield modification for improving substrate temperature uniformity | Elizabeth Neville, Kartik Shah, Vinay Prabhakar, Venkata Sharat Chandra Parimi, Sungwon Ha | 2022-11-29 |
| 11505863 | Methods for forming films on substrates | Alexander Lerner, Roey Shaviv, Prashanth Kothnur, Xiaozhou Che | 2022-11-22 |
| 11393703 | Apparatus and method for controlling a flow process material to a deposition chamber | Alexander Lerner, Roey Shaviv, Phillip Stout, Joseph M. Ranish, Prashanth Kothnur | 2022-07-19 |