| 12473639 |
Methods for forming films on substrates |
Alexander Lerner, Roey Shaviv, Satish Radhakrishnan, Xiaozhou Che |
2025-11-18 |
|
| 12443175 |
Eco-efficiency (sustainability) dashboard for semiconductor manufacturing |
Ala Moradian, Elizabeth Neville, Umesh M. Kelkar, Mark Denome, Karthik Ramanathan +3 more |
2025-10-14 |
|
| 12438011 |
Apparatus and method for controlling a flow process material to a deposition chamber |
Alexander Lerner, Roey Shaviv, Phillip Stout, Joseph M. Ranish, Satish Radhakrishnan |
2025-10-07 |
|
| 12325909 |
EM source for enhanced plasma control |
Alexander Jansen, Keith A. Miller, Martin Lee Riker, David Gunther, Emily Schooley |
2025-06-10 |
|
| 12203163 |
Methods for shaping magnetic fields during semiconductor processing |
Goichi Yoshidome, Suhas Bangalore Umesh, Sushil Arun Samant, Martin Lee Riker, Wei Lei +4 more |
2025-01-21 |
|
| 12131105 |
Virtual measurement of conditions proximate to a substrate with physics-informed compressed sensing |
Preetham Rao |
2024-10-29 |
$69,228,000 |
| 12043895 |
Methods of using a segmented showerhead for uniform delivery of multiple pre-cursors |
Alexander Lerner, Roey Shaviv, Satish Radhakrishnan |
2024-07-23 |
$84,339,000 |
| 12001197 |
Eco-efficiency (sustainability) dashboard for semiconductor manufacturing |
Ala Moradian, Elizabeth Neville, Umesh M. Kelkar, Mark Denome, Karthik Ramanathan +3 more |
2024-06-04 |
$68,807,000 |
| 11970775 |
Showerhead for providing multiple materials to a process chamber |
Satish Radhakrishnan, Alexander Lerner, Sergei Klimovich, Roey Shaviv |
2024-04-30 |
$79,776,000 |
| 11834743 |
Segmented showerhead for uniform delivery of multiple precursors |
Alexander Lerner, Roey Shaviv, Satish Radhakrishnan |
2023-12-05 |
$45,995,000 |
| 11692262 |
EM source for enhanced plasma control |
Alexander Jansen, Keith A. Miller, Martin Lee Riker, David Gunther, Emily Schooley |
2023-07-04 |
|
| 11655534 |
Apparatus for reducing tungsten resistivity |
Wenting Hou, Jianxin Lei, Jothilingam Ramalingam, William Johanson |
2023-05-23 |
$53,064,000 |
| 11600476 |
Deposition system with multi-cathode and method of manufacture thereof |
Anantha K. Subramani, Deepak Jadhav, Ashish Goel, Hanbing Wu, Chi Hong Ching |
2023-03-07 |
$32,704,000 |
| 11505863 |
Methods for forming films on substrates |
Alexander Lerner, Roey Shaviv, Satish Radhakrishnan, Xiaozhou Che |
2022-11-22 |
$48,755,000 |
| D969980 |
Deposition chamber showerhead |
Alexander Lerner, Graeme Scott |
2022-11-15 |
|
| 11495440 |
Plasma density control on substrate edge |
Bhaskar Kumar, Sidharth Bhatia, Anup K. Singh, Vivek Shah, Ganesh Balasubramanian +1 more |
2022-11-08 |
$47,551,000 |
| D967351 |
Showerhead reflector |
Alexander Lerner, Graeme Scott |
2022-10-18 |
|
| 11447857 |
Methods and apparatus for reducing tungsten resistivity |
Wenting Hou, Jianxin Lei, Jothilingam Ramalingam, William Johanson |
2022-09-20 |
$25,949,000 |
| 11393703 |
Apparatus and method for controlling a flow process material to a deposition chamber |
Alexander Lerner, Roey Shaviv, Phillip Stout, Joseph M. Ranish, Satish Radhakrishnan |
2022-07-19 |
$63,937,000 |
| 11183375 |
Deposition system with multi-cathode and method of manufacture thereof |
Anantha K. Subramani, Deepak Jadhav, Ashish Goel, Hanbing Wu, Chi Hong Ching |
2021-11-23 |
$124,354,000 |
| 11170982 |
Methods and apparatus for producing low angle depositions |
Anantha K. Subramani, Praburam Gopal Raja, Steven V. Sansoni, John C. Forster, Philip Allan Kraus +5 more |
2021-11-09 |
$68,627,000 |
| 10790121 |
Plasma density control on substrate edge |
Bhaskar Kumar, Sidharth Bhatia, Anup K. Singh, Vivek Shah, Ganesh Balasubramanian +1 more |
2020-09-29 |
$24,138,000 |
| 9991101 |
Magnetron assembly for physical vapor deposition chamber |
William Johanson, Brij Datta, Fuhong Zhang, Adolph Miller Allen, Yu Liu |
2018-06-05 |
$36,422,000 |
| 9928997 |
Apparatus for PVD dielectric deposition |
Keith A. Miller, Thanh X. Nguyen, Ilya Lavitsky, Randy D. Schmieding |
2018-03-27 |
$21,583,000 |
| 9831074 |
Bipolar collimator utilized in a physical vapor deposition chamber |
Joung Joo Lee, Guojun Liu, Wei Wang |
2017-11-28 |
$20,834,000 |
