| 12443175 |
Eco-efficiency (sustainability) dashboard for semiconductor manufacturing |
Ala Moradian, Elizabeth Neville, Umesh M. Kelkar, Prashanth Kothnur, Karthik Ramanathan +3 more |
2025-10-14 |
|
| 12001197 |
Eco-efficiency (sustainability) dashboard for semiconductor manufacturing |
Ala Moradian, Elizabeth Neville, Umesh M. Kelkar, Prashanth Kothnur, Karthik Ramanathan +3 more |
2024-06-04 |
$68,807,000 |
| 10942507 |
Eco-efficiency characterization tool |
Vijayakumar C. Venugopal, Ashish Kumar, Vijai Thangamany, Somil Kapdia, Ching-Hong Hsieh |
2021-03-09 |
$63,182,000 |
| 10185313 |
Eco-efficiency characterization tool |
Vijayakumar C. Venugopal, Ashish Kumar, Vijai Thangamany, Somil KAPADIA, Ching-Hong Hsieh |
2019-01-22 |
$28,931,000 |
| 7497932 |
Electro-chemical deposition system |
Mark Cassidy Cridlin Lloyd, Donald Olgado, Ratson Morad, Peter Hey, Michael Sugarman +10 more |
2009-03-03 |
$11,197,000 |
| 7005046 |
Apparatus for electro chemical deposition |
Joseph Stevens, Yevgeniy Rabinovich, Sandy Chao, Allen L. D'Ambra, Donald Olgado |
2006-02-28 |
$21,386,000 |
| 6837978 |
Deposition uniformity control for electroplating apparatus, and associated method |
H. Peter W. Hey, Yezdi Dordi, Donald Olgado |
2005-01-04 |
$20,484,000 |
| 6635157 |
Electro-chemical deposition system |
Yezdi Dordi, Donald Olgado, Ratson Morad, Peter Hey, Michael Sugarman +10 more |
2003-10-21 |
$27,123,000 |
| 6599402 |
Electro-chemical deposition cell for face-up processing of single semiconductor substrates |
Yezdi Dordi, Joe Stevens, Roy Edwards, Bob Lowrance, Michael Sugarman |
2003-07-29 |
$37,730,000 |
| 6551488 |
Segmenting of processing system into wet and dry areas |
H. Peter W. Hey, Michael Sugarman |
2003-04-22 |
$40,104,000 |
| 6517130 |
Self positioning vacuum chuck |
Bernardo Donoso, Joseph Stevens, Donald Olgado |
2003-02-11 |
$17,783,000 |
| 6454927 |
Apparatus and method for electro chemical deposition |
Joseph Stevens, Yevgeniy Rabinovich, Sandy Chao, Allen L. D'Ambra, Donald Olgado |
2002-09-24 |
$13,765,000 |
| 6416647 |
Electro-chemical deposition cell for face-up processing of single semiconductor substrates |
Yezdi Dordi, Joe Stevens, Roy Edwards, Bob Lowrance, Michael Sugarman |
2002-07-09 |
$129,092,000 |
| 6258220 |
Electro-chemical deposition system |
Yezdi Dordi, Donald Olgado, Ratson Morad, Peter Hey, Michael Sugarman +10 more |
2001-07-10 |
$71,204,000 |
