Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12240078 | Cleaning system for polishing liquid delivery arm | Roy C. Nangoy, Shantanu Rajiv Gadgil, Nathan Davis, Michael J. Coughlin, Sumit Subhash Patankar | 2025-03-04 |
| 12134167 | Pad conditioner cleaning system | Shantanu Rajiv Gadgil, Sumit Subhash Patankar, Nathan Davis, Michael J. Coughlin | 2024-11-05 |
| 11986925 | Maintenance methods for polishing systems and articles related thereto | Shantanu Rajiv Gadgil, Sumit Subhash Patankar, Nathan Davis, Michael J. Coughlin | 2024-05-21 |
| 11756804 | Platen shield cleaning system | Shantanu Rajiv Gadgil, Sumit Subhash Patankar, Nathan Davis | 2023-09-12 |
| 11648645 | Pad conditioner cleaning system | Shantanu Rajiv Gadgil, Sumit Subhash Patankar, Nathan Davis, Michael J. Coughlin | 2023-05-16 |
| 11545371 | Platen shield cleaning system | Shantanu Rajiv Gadgil, Sumit Subhash Patankar, Nathan Davis | 2023-01-03 |
| 11484987 | Maintenance methods for polishing systems and articles related thereto | Shantanu Rajiv Gadgil, Sumit Subhash Patankar, Nathan Davis, Michael J. Coughlin | 2022-11-01 |
| 11433436 | Carousel for ultrasonic cleaning and method of using thereof | Michael J. Coughlin | 2022-09-06 |
| 11370083 | Pad conditioner cleaning system | Shantanu Rajiv Gadgil, Sumit Subhash Patankar, Nathan Davis, Michael J. Coughlin | 2022-06-28 |
| 11251047 | Clog detection in a multi-port fluid delivery system | Roy C. Nangoy, Chad Pollard | 2022-02-15 |
| 9646859 | Disk-brush cleaner module with fluid jet | Hui Chen, Sen-Hou Ko, Yufei Chen, Adrian Blank, Mario David Silvetti +2 more | 2017-05-09 |
| 9227293 | Multi-platen multi-head polishing architecture | Jeffrey Drue David, Boguslaw A. Swedek, Doyle E. Bennett, Thomas H. Osterheld, Benjamin Cherian +3 more | 2016-01-05 |
| 8968055 | Methods and apparatus for pre-chemical mechanical planarization buffing module | Hui Chen, Jim K. Atkinson, Hung Chih Chen | 2015-03-03 |
| 8869422 | Methods and apparatus for marangoni substrate drying using a vapor knife manifold | Edwin Velazquez, Jim K. Atkinson | 2014-10-28 |
| 8844546 | Apparatus and method for cleaning semiconductor substrate using pressurized fluid | Hui Chen | 2014-09-30 |
| 8308529 | High throughput chemical mechanical polishing system | Alpay Yilmaz | 2012-11-13 |
| 8172643 | Polishing system having a track | Alpay Yilmaz, Jagan Rangarajan, Lakshmanan Karuppiah | 2012-05-08 |
| 7988535 | Platen exhaust for chemical mechanical polishing system | Hung Chih Chen, Donald Olgado | 2011-08-02 |
| 7962990 | Brush box cleaner module with force control | Hui Chen, Joseph Yudovsky | 2011-06-21 |
| 7473339 | Slim cell platform plumbing | Arulkumar Shanmugasundram, Michael Yang, Yevgeniy Rabinovich, Dmitry Lubomirsky | 2009-01-06 |
| 7223323 | Multi-chemistry plating system | Michael Yang, Ming Xi, Russell C. Ellwanger, Eric Bramwell Britcher, Bernardo Donoso +11 more | 2007-05-29 |
| 7155319 | Closed loop control on liquid delivery system ECP slim cell | Roy C. Nangoy, Yevgeniy Rabinovich, David Z. Chen, Tao Li | 2006-12-26 |
| 7005046 | Apparatus for electro chemical deposition | Joseph Stevens, Yevgeniy Rabinovich, Sandy Chao, Mark Denome, Donald Olgado | 2006-02-28 |
| 6869516 | Method for removing electrolyte from electrical contacts and wafer touching areas | Dmitry Lubomirsky, Michael Yang, Girish Dixit, Vincent E. Burkhart, Yeuk-Fai Edwin Mok +1 more | 2005-03-22 |
| 6454927 | Apparatus and method for electro chemical deposition | Joseph Stevens, Yevgeniy Rabinovich, Sandy Chao, Mark Denome, Donald Olgado | 2002-09-24 |