| 12502748 |
Control substrate polishing using constrained cost function |
Sivakumar Dhandapani |
2025-12-23 |
|
| 12504364 |
In-situ monitoring to label training spectra for machine learning system for spectrographic monitoring |
Thaddeus Siu-Por Li |
2025-12-23 |
|
| 12479062 |
Determining substrate orientation with acoustic signals |
Nicholas A. Wiswell, Jun Qian, Thomas H. Osterheld |
2025-11-25 |
|
| 12447577 |
Polishing apparatus using neural network for monitoring |
Kui Xu, Hassan G. Iravani, Denis Ivanov, Boguslaw A. Swedek, Shih-Haur Shen +1 more |
2025-10-21 |
|
| 12440942 |
Pressure signals with different frequencies during friction monitoring to provide spatial resolution |
Thaddeus Siu-Por Li |
2025-10-14 |
|
| 12420373 |
Control of processing parameters during substrate polishing using cost function |
Sivakumar Dhandapani |
2025-09-23 |
|
| 12403560 |
Determining substrate precession with acoustic signals |
Nicholas A. Wiswell, Jun Qian, Thomas H. Osterheld |
2025-09-02 |
|
| 12343840 |
Control of processing parameters for substrate polishing with substrate precession |
Eric Lau, Charles C. Garretson, Huanbo Zhang, Zhize Zhu, Brian J. Brown +1 more |
2025-07-01 |
|
| 12311494 |
Pressure signals during motor torque monitoring to provide spatial resolution |
Thomas Li |
2025-05-27 |
|
| 12257665 |
Machine vision as input to a CMP process control algorithm |
Jun Qian, Nicholas A. Wiswell, Dominic J. Benvegnu, Boguslaw A. Swedek, Thomas H. Osterheld |
2025-03-25 |
|
| 12148149 |
Training a machine learning system to detect an excursion of a CMP component using time-based sequence of images |
Sidney P. Huey, Thomas Li |
2024-11-19 |
$80,955,000 |
| 12136574 |
Technique for training neural network for use in in-situ monitoring during polishing and polishing system |
Kun Xu, Kiran Shrestha, Doyle E. Bennett, David Maxwell Gage, Jun Qian +1 more |
2024-11-05 |
$79,202,000 |
| 12090599 |
Determination of substrate layer thickness with polishing pad wear compensation |
Kun Xu, Jun Qian, Kiran Shrestha |
2024-09-17 |
$46,375,000 |
| 12079984 |
Detecting an excursion of a CMP component using time-based sequence of images |
Sidney P. Huey, Thomas Li |
2024-09-03 |
$44,731,000 |
| 12057354 |
Trained neural network in in-situ monitoring during polishing and polishing system |
Kun Xu, Kiran Shrestha, Doyle E. Bennett, David Maxwell Gage, Jun Qian +1 more |
2024-08-06 |
$90,312,000 |
| 12020159 |
Training spectrum generation for machine learning system for spectrographic monitoring |
Nicholas A. Wiswell, Jun Qian, Thomas H. Osterheld |
2024-06-25 |
$57,214,000 |
| 11969854 |
Control of processing parameters during substrate polishing using expected future parameter changes |
Sivakumar Dhandapani |
2024-04-30 |
$79,776,000 |
| 11966212 |
Spectrographic monitoring using a neural network |
— |
2024-04-23 |
$64,043,000 |
| 11931853 |
Control of processing parameters for substrate polishing with angularly distributed zones using cost function |
Eric Lau, Charles C. Garretson, Huanbo Zhang, Zhize Zhu, Brian J. Brown +1 more |
2024-03-19 |
$54,086,000 |
| 11919121 |
Control of processing parameters during substrate polishing using constrained cost function |
Sivakumar Dhandapani |
2024-03-05 |
$73,319,000 |
| 11865664 |
Profile control with multiple instances of contol algorithm during polishing |
Kun Xu, Harry Q. Lee, David Maxwell Gage |
2024-01-09 |
$49,156,000 |
| 11865671 |
Temperature-based in-situ edge assymetry correction during CMP |
Haosheng Wu, Shou-Sung Chang, Jianshe Tang, Chih Chung Chou, Hui Chen +1 more |
2024-01-09 |
$49,156,000 |
| 11850699 |
Switching control algorithms on detection of exposure of underlying layer during polishing |
Kun Xu, Harry Q. Lee, David Maxwell Gage |
2023-12-26 |
$30,871,000 |
| 11791224 |
Technique for training neural network for use in in-situ monitoring during polishing and polishing system |
Kun Xu, Kiran Shrestha, Doyle E. Bennett, David Maxwell Gage, Jun Qian +1 more |
2023-10-17 |
$42,568,000 |
| 11780047 |
Determination of substrate layer thickness with polishing pad wear compensation |
Kun Xu, Jun Qian, Kiran Shrestha |
2023-10-10 |
$39,034,000 |
