Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12403560 | Determining substrate precession with acoustic signals | Benjamin Cherian, Jun Qian, Thomas H. Osterheld | 2025-09-02 |
| 12257665 | Machine vision as input to a CMP process control algorithm | Benjamin Cherian, Jun Qian, Dominic J. Benvegnu, Boguslaw A. Swedek, Thomas H. Osterheld | 2025-03-25 |
| 12233505 | Polishing system with capacitive shear sensor | Chih Chung Chou, Dominic J. Benvegnu | 2025-02-25 |
| 12020159 | Training spectrum generation for machine learning system for spectrographic monitoring | Benjamin Cherian, Jun Qian, Thomas H. Osterheld | 2024-06-25 |
| 11701749 | Monitoring of vibrations during chemical mechanical polishing | Boguslaw A. Swedek, Dominic J. Benvegnu, Chih Chung Chou, Thomas H. Osterheld, Jeonghoon Oh | 2023-07-18 |
| 11660722 | Polishing system with capacitive shear sensor | Chih Chung Chou, Dominic J. Benvegnu | 2023-05-30 |
| 11651207 | Training spectrum generation for machine learning system for spectrographic monitoring | Benjamin Cherian, Jun Qian, Thomas H. Osterheld | 2023-05-16 |
| 11577356 | Machine vision as input to a CMP process control algorithm | Benjamin Cherian, Jun Qian, Dominic J. Benvegnu, Boguslaw A. Swedek, Thomas H. Osterheld | 2023-02-14 |
| 11507824 | Training spectrum generation for machine learning system for spectrographic monitoring | Benjamin Cherian, Jun Qian, Thomas H. Osterheld | 2022-11-22 |
| 11478894 | Polishing fluid additive concentration measurement apparatus and methods related thereto | — | 2022-10-25 |