| 12403560 |
Determining substrate precession with acoustic signals |
Benjamin Cherian, Jun Qian, Thomas H. Osterheld |
2025-09-02 |
| 12257665 |
Machine vision as input to a CMP process control algorithm |
Benjamin Cherian, Jun Qian, Dominic J. Benvegnu, Boguslaw A. Swedek, Thomas H. Osterheld |
2025-03-25 |
| 12233505 |
Polishing system with capacitive shear sensor |
Chih Chung Chou, Dominic J. Benvegnu |
2025-02-25 |
| 12020159 |
Training spectrum generation for machine learning system for spectrographic monitoring |
Benjamin Cherian, Jun Qian, Thomas H. Osterheld |
2024-06-25 |
| 11701749 |
Monitoring of vibrations during chemical mechanical polishing |
Boguslaw A. Swedek, Dominic J. Benvegnu, Chih Chung Chou, Thomas H. Osterheld, Jeonghoon Oh |
2023-07-18 |
| 11660722 |
Polishing system with capacitive shear sensor |
Chih Chung Chou, Dominic J. Benvegnu |
2023-05-30 |
| 11651207 |
Training spectrum generation for machine learning system for spectrographic monitoring |
Benjamin Cherian, Jun Qian, Thomas H. Osterheld |
2023-05-16 |
| 11577356 |
Machine vision as input to a CMP process control algorithm |
Benjamin Cherian, Jun Qian, Dominic J. Benvegnu, Boguslaw A. Swedek, Thomas H. Osterheld |
2023-02-14 |
| 11507824 |
Training spectrum generation for machine learning system for spectrographic monitoring |
Benjamin Cherian, Jun Qian, Thomas H. Osterheld |
2022-11-22 |
| 11478894 |
Polishing fluid additive concentration measurement apparatus and methods related thereto |
— |
2022-10-25 |
