Issued Patents All Time
Showing 25 most recent of 67 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12403560 | Determining substrate precession with acoustic signals | Nicholas A. Wiswell, Benjamin Cherian, Jun Qian | 2025-09-02 |
| 12343840 | Control of processing parameters for substrate polishing with substrate precession | Eric Lau, Charles C. Garretson, Huanbo Zhang, Zhize Zhu, Benjamin Cherian +1 more | 2025-07-01 |
| 12257665 | Machine vision as input to a CMP process control algorithm | Benjamin Cherian, Jun Qian, Nicholas A. Wiswell, Dominic J. Benvegnu, Boguslaw A. Swedek | 2025-03-25 |
| 12020159 | Training spectrum generation for machine learning system for spectrographic monitoring | Benjamin Cherian, Nicholas A. Wiswell, Jun Qian | 2024-06-25 |
| 11931853 | Control of processing parameters for substrate polishing with angularly distributed zones using cost function | Eric Lau, Charles C. Garretson, Huanbo Zhang, Zhize Zhu, Benjamin Cherian +1 more | 2024-03-19 |
| 11931860 | Consumable part monitoring in chemical mechanical polisher | Dominic J. Benvegnu | 2024-03-19 |
| 11780046 | Polishing system with annular platen or polishing pad | Paul D. Butterfield, Jeonghoon Oh, Shou-Sung Chang, Steven M. Zuniga, Fred C. Redeker | 2023-10-10 |
| 11731238 | Monitoring of polishing pad texture in chemical mechanical polishing | Benjamin Cherian | 2023-08-22 |
| 11701749 | Monitoring of vibrations during chemical mechanical polishing | Boguslaw A. Swedek, Dominic J. Benvegnu, Chih Chung Chou, Nicholas A. Wiswell, Jeonghoon Oh | 2023-07-18 |
| 11699595 | Imaging for monitoring thickness in a substrate cleaning system | Dominic J. Benvegnu, Jun Qian, Boguslaw A. Swedek | 2023-07-11 |
| 11651207 | Training spectrum generation for machine learning system for spectrographic monitoring | Benjamin Cherian, Nicholas A. Wiswell, Jun Qian | 2023-05-16 |
| 11577356 | Machine vision as input to a CMP process control algorithm | Benjamin Cherian, Jun Qian, Nicholas A. Wiswell, Dominic J. Benvegnu, Boguslaw A. Swedek | 2023-02-14 |
| 11571786 | Consumable part monitoring in chemical mechanical polisher | Dominic J. Benvegnu | 2023-02-07 |
| 11511388 | Polishing system with support post and annular platen or polishing pad | Paul D. Butterfield, Jeonghoon Oh, Shou-Sung Chang, Steven M. Zuniga, Fred C. Redeker | 2022-11-29 |
| 11507824 | Training spectrum generation for machine learning system for spectrographic monitoring | Benjamin Cherian, Nicholas A. Wiswell, Jun Qian | 2022-11-22 |
| 11453097 | Chemical mechanical polishing apparatus and methods | Rajeev Bajaj, Hung Chih Chen, Terrance Y. Lee | 2022-09-27 |
| 10589399 | Textured small pad for chemical mechanical polishing | Jeonghoon Oh, Edwin C. Suarez, Jason Garcheung Fung, Eric Lau, King Yi Heung +3 more | 2020-03-17 |
| 10562147 | Polishing system with annular platen or polishing pad for substrate monitoring | Paul D. Butterfield, Jeonghoon Oh, Shou-Sung Chang, Steven M. Zuniga, Fred C. Redeker | 2020-02-18 |
| 10500694 | Chemical mechanical polishing apparatus and methods | Rajeev Bajaj, Hung Chih Chen, Terrance Y. Lee | 2019-12-10 |
| 10478937 | Acoustic emission monitoring and endpoint for chemical mechanical polishing | Jianshe Tang, David Masayuki Ishikawa, Benjamin Cherian, Jeonghoon Oh | 2019-11-19 |
| 10256111 | Chemical mechanical polishing automated recipe generation | Eric Lau, King Yi Heung, Charles C. Garretson, Jun Qian, Shuchivrat Datar +1 more | 2019-04-09 |
| 9242337 | Dynamic residue clearing control with in-situ profile control (ISPC) | Jun Qian, Sivakumar Dhandapani, Benjamin Cherian, Charles C. Garretson | 2016-01-26 |
| 9227293 | Multi-platen multi-head polishing architecture | Jeffrey Drue David, Boguslaw A. Swedek, Doyle E. Bennett, Benjamin Cherian, Dominic J. Benvegnu +3 more | 2016-01-05 |
| 9221147 | Endpointing with selective spectral monitoring | Jun Qian, Sivakumar Dhandapani, Benjamin Cherian, Jeffrey Drue David, Gregory E. Menk +2 more | 2015-12-29 |
| 9138858 | Thin polishing pad with window and molding process | Dominic J. Benvegnu, Jimin Zhang, Boguslaw A. Swedek | 2015-09-22 |