Issued Patents All Time
Showing 25 most recent of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12343840 | Control of processing parameters for substrate polishing with substrate precession | Eric Lau, Huanbo Zhang, Zhize Zhu, Benjamin Cherian, Brian J. Brown +1 more | 2025-07-01 |
| 12251788 | Polishing head with local wafer pressure | Andrew J. Nagengast, Steven M. Zuniga, Jay Gurusamy, Vladimir Galburt | 2025-03-18 |
| 11986923 | Polishing head with local wafer pressure | Andrew J. Nagengast, Steven M. Zuniga, Jay Gurusamy, Vladimir Galburt | 2024-05-21 |
| 11931853 | Control of processing parameters for substrate polishing with angularly distributed zones using cost function | Eric Lau, Huanbo Zhang, Zhize Zhu, Benjamin Cherian, Brian J. Brown +1 more | 2024-03-19 |
| 11869815 | Asymmetry correction via oriented wafer loading | Eric Lau, Huanbo Zhang, Zhize Zhu | 2024-01-09 |
| 11850703 | Method of forming retaining ring with shaped surface | Hung Chih Chen, Steven M. Zuniga, Douglas R. McAllister, Jian Lin, Stacy Meyer +12 more | 2023-12-26 |
| 11577361 | Retaining ring with shaped surface and method of forming | Hung Chih Chen, Steven M. Zuniga, Douglas R. McAllister, Jian Lin, Stacy Meyer +12 more | 2023-02-14 |
| 11400560 | Retaining ring design | Jeonghoon Oh, Eric Lau, Andrew J. Nagengast, Steven M. Zuniga, Edwin C. Suarez +2 more | 2022-08-02 |
| 11282755 | Asymmetry correction via oriented wafer loading | Eric Lau, Huanbo Zhang, Zhize Zhu | 2022-03-22 |
| 11260500 | Retaining ring with shaped surface | Hung Chih Chen, Steven M. Zuniga, Douglas R. McAllister, Jian Lin, Stacy Meyer +12 more | 2022-03-01 |
| 11241769 | Methods and apparatus for profile and surface preparation of retaining rings utilized in chemical mechanical polishing processes | David Masayuki Ishikawa, Jeonghoon Oh, Garrett H. Sin, Huanbo Zhang, Chia-Ling PAI +2 more | 2022-02-08 |
| 10766117 | Retaining ring with shaped surface | Hung Chih Chen, Steven M. Zuniga, Douglas R. McAllister, Jian Lin, Stacy Meyer +12 more | 2020-09-08 |
| 10610994 | Polishing system with local area rate control and oscillation mode | Eric Lau, Hui Chen, King Yi Heung, Chih Chung Chou, Edwin C. Suarez +2 more | 2020-04-07 |
| 10589399 | Textured small pad for chemical mechanical polishing | Jeonghoon Oh, Edwin C. Suarez, Jason Garcheung Fung, Eric Lau, King Yi Heung +3 more | 2020-03-17 |
| 10434623 | Local area polishing system and polishing pad assemblies for a polishing system | Eric Lau, Hui Chen, King Yi Heung, Wei-Cheng Lee, Chih Chung Chou +3 more | 2019-10-08 |
| 10256111 | Chemical mechanical polishing automated recipe generation | Eric Lau, King Yi Heung, Jun Qian, Thomas H. Osterheld, Shuchivrat Datar +1 more | 2019-04-09 |
| 10252397 | Methods and apparatus for profile and surface preparation of retaining rings utilized in chemical mechanical polishing processes | David Masayuki Ishikawa, Jeonghoon Oh, Garrett H. Sin, Huanbo Zhang, Chia-Ling PAI +2 more | 2019-04-09 |
| 9937601 | Retaining ring with Shaped Surface | Hung Chih Chen, Steven M. Zuniga, Douglas R. McAllister, Jian Lin, Stacy Meyer +12 more | 2018-04-10 |
| 9242337 | Dynamic residue clearing control with in-situ profile control (ISPC) | Jun Qian, Sivakumar Dhandapani, Benjamin Cherian, Thomas H. Osterheld | 2016-01-26 |
| 9186773 | Retaining ring with shaped surface | Hung Chih Chen, Steven M. Zuniga, Douglas R. McAllister, Jian Lin, Stacy Meyer +12 more | 2015-11-17 |
| 9138860 | Closed-loop control for improved polishing pad profiles | Sivakumar Dhandapani, Jun Qian, Christopher Cocca, Jason Garcheung Fung, Shou-Sung Chang +2 more | 2015-09-22 |
| 9017138 | Retaining ring monitoring and control of pressure | Hung Chih Chen, Thomas H. Osterheld, Jason Garcheung Fung | 2015-04-28 |
| 8758085 | Method for compensation of variability in chemical mechanical polishing consumables | Sivakumar Dhandapani, Asheesh Jain, Gregory E. Menk, Stan Tsai | 2014-06-24 |
| 8755927 | Feedback for polishing rate correction in chemical mechanical polishing | Jun Qian, Sivakumar Dhandapani, Jeffrey Drue David, Harry Q. Lee | 2014-06-17 |
| 8585468 | Retaining ring with shaped surface | Hung Chih Chen, Steven M. Zuniga, Douglas R. McAllister, Jian Lin, Stacy Meyer +12 more | 2013-11-19 |