| 12456638 |
Methods and systems for temperature control for a substrate |
Nicholas Michael Bergantz, Jeffrey C. Hudgens, Henry Jay Lee |
2025-10-28 |
|
| 12165905 |
Process kit enclosure system |
Helder Lee, Nicholas Michael Kopec, Leon Volfovski, Andreas Schmid, Jeffrey C. Hudgens +2 more |
2024-12-10 |
$69,596,000 |
| 12159795 |
Enclosure system having walls comprising sidewalls and radio-frequency identifier holder coupled to rear wall |
John C. Menk, Rachel Sara Stolzman |
2024-12-03 |
$97,002,000 |
| 11850703 |
Method of forming retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Jian Lin, Stacy Meyer +12 more |
2023-12-26 |
$30,871,000 |
| 11842917 |
Process kit ring adaptor |
Leon Volfovski, Andreas Schmid, Denis M. Koosau, Nicholas Michael Kopec, Steven E. Babayan +3 more |
2023-12-12 |
$82,062,000 |
| 11577361 |
Retaining ring with shaped surface and method of forming |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Jian Lin, Stacy Meyer +12 more |
2023-02-14 |
$35,617,000 |
| 11260500 |
Retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Jian Lin, Stacy Meyer +12 more |
2022-03-01 |
$41,046,000 |
| 11211269 |
Multi-object capable loadlock system |
Andrew Paul Harbert, Michael C Kuchar, Nicholas Michael Bergantz, Leon Volfovski, Sivakumar Ramalingam +1 more |
2021-12-28 |
$93,125,000 |
| 10964584 |
Process kit ring adaptor |
Leon Volfovski, Andreas Schmid, Denis M. Koosau, Nicholas Michael Kopec, Steven E. Babayan +3 more |
2021-03-30 |
$120,425,000 |
| 10766117 |
Retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Jian Lin, Stacy Meyer +12 more |
2020-09-08 |
$22,964,000 |
| 10741428 |
Semiconductor processing chamber |
Aaron Muir Hunter, Mehran Behdjat, Niraj Merchant, Dongming Iu, Kong CHAN +1 more |
2020-08-11 |
$71,596,000 |
| 9937601 |
Retaining ring with Shaped Surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Jian Lin, Stacy Meyer +12 more |
2018-04-10 |
$134,735,000 |
| 9462636 |
RTP lamp base with removal features |
Joseph M. Ranish |
2016-10-04 |
$14,162,000 |
| 9186773 |
Retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Jian Lin, Stacy Meyer +12 more |
2015-11-17 |
$15,900,000 |
| 8585468 |
Retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Jian Lin, Stacy Meyer +12 more |
2013-11-19 |
$10,370,000 |
| 8523639 |
Self cleaning and adjustable slurry delivery arm |
Jamie Stuart Leighton, Abhijit Desai |
2013-09-03 |
$10,482,000 |
| 8066551 |
Retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Jian Lin, Stacy Meyer +12 more |
2011-11-29 |
$8,648,000 |
| 7927190 |
Retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Jian Lin, Stacy Meyer +12 more |
2011-04-19 |
$9,957,000 |
| 7530153 |
Attaching components of a carrier head |
Trung T. Doan, Jeffrey P. Schmidt, Stacy Meyer |
2009-05-12 |
$30,677,000 |
| 7503837 |
Composite retaining ring |
Jeonghoon Oh, Hung Chih Chen, Thomas Brezoczky, David Datong Huo |
2009-03-17 |
$10,205,000 |
| 7344434 |
Retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Stacy Meyer, Trung T. Doan +5 more |
2008-03-18 |
$36,315,000 |
| 7186171 |
Composite retaining ring |
Jeonghoon Oh, Hung Chih Chen, Thomas Brezoczky, David Datong Huo |
2007-03-06 |
$17,668,000 |
| 6410889 |
Method and apparatus for reducing contamination in a wafer loadlock of a semiconductor wafer processing system |
Matthew F. Davis, David Evans |
2002-06-25 |
$39,568,000 |
| 6323463 |
Method and apparatus for reducing contamination in a wafer loadlock of a semiconductor wafer processing system |
Matthew F. Davis, David Evans |
2001-11-27 |
$67,261,000 |
