Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094740 | Automated dry-in dry-out dual side polishing of silicon substrates with integrated spin rinse dry and metrology | Manoj A. Gajendra, Mahadev Joshi, Joseph Antony Jonathan | 2024-09-17 |
| 12036635 | Methods of detecting non-conforming substrate processing events during chemical mechanical polishing | Jeonghoon Oh, Ashish Bhushan, John Garcia, Stephen Thomas Cormier, Nick Joseph Jackson +2 more | 2024-07-16 |
| 11911869 | Chemical mechanical polishing system with platen temperature control | Jeonghoon Oh, Van H. Nguyen, Roger M. Johnson | 2024-02-27 |
| 11850700 | Sequential application of cleaning fluids for improved maintenance of chemical mechanical polishing systems | Jeonghoon Oh, Roger M. Johnson, Van H. Nguyen | 2023-12-26 |
| 11370079 | Reinforcement ring for carrier head with flexible membrane | Jeonghoon Oh | 2022-06-28 |
| 11338409 | Three-zone carrier head and flexible membrane | Jeonghoon Oh | 2022-05-24 |
| 10532441 | Three-zone carrier head and flexible membrane | Jeonghoon Oh | 2020-01-14 |
| 9673113 | Method and system for real-time polishing recipe control | Yee Sheen Pong | 2017-06-06 |
| 9381613 | Reinforcement ring for carrier head | Stacy Meyer, Young J. Paik | 2016-07-05 |
| 8523639 | Self cleaning and adjustable slurry delivery arm | Abhijit Desai, Douglas R. McAllister | 2013-09-03 |